JPS6075460U - プラズマ気相成長装置 - Google Patents

プラズマ気相成長装置

Info

Publication number
JPS6075460U
JPS6075460U JP16767283U JP16767283U JPS6075460U JP S6075460 U JPS6075460 U JP S6075460U JP 16767283 U JP16767283 U JP 16767283U JP 16767283 U JP16767283 U JP 16767283U JP S6075460 U JPS6075460 U JP S6075460U
Authority
JP
Japan
Prior art keywords
vapor phase
plasma vapor
phase growth
growth equipment
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16767283U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140774Y2 (OSRAM
Inventor
赤井　良夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16767283U priority Critical patent/JPS6075460U/ja
Publication of JPS6075460U publication Critical patent/JPS6075460U/ja
Application granted granted Critical
Publication of JPS6140774Y2 publication Critical patent/JPS6140774Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP16767283U 1983-10-28 1983-10-28 プラズマ気相成長装置 Granted JPS6075460U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16767283U JPS6075460U (ja) 1983-10-28 1983-10-28 プラズマ気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16767283U JPS6075460U (ja) 1983-10-28 1983-10-28 プラズマ気相成長装置

Publications (2)

Publication Number Publication Date
JPS6075460U true JPS6075460U (ja) 1985-05-27
JPS6140774Y2 JPS6140774Y2 (OSRAM) 1986-11-20

Family

ID=30366770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16767283U Granted JPS6075460U (ja) 1983-10-28 1983-10-28 プラズマ気相成長装置

Country Status (1)

Country Link
JP (1) JPS6075460U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0199213A (ja) * 1987-10-13 1989-04-18 Mitsui Toatsu Chem Inc 膜形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0199213A (ja) * 1987-10-13 1989-04-18 Mitsui Toatsu Chem Inc 膜形成装置

Also Published As

Publication number Publication date
JPS6140774Y2 (OSRAM) 1986-11-20

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