JPS6074434A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6074434A
JPS6074434A JP58181157A JP18115783A JPS6074434A JP S6074434 A JPS6074434 A JP S6074434A JP 58181157 A JP58181157 A JP 58181157A JP 18115783 A JP18115783 A JP 18115783A JP S6074434 A JPS6074434 A JP S6074434A
Authority
JP
Japan
Prior art keywords
substrate
film
mark
position matching
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58181157A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544175B2 (show.php
Inventor
Koichi Kobayashi
孝一 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58181157A priority Critical patent/JPS6074434A/ja
Publication of JPS6074434A publication Critical patent/JPS6074434A/ja
Publication of JPH0544175B2 publication Critical patent/JPH0544175B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP58181157A 1983-09-29 1983-09-29 半導体装置の製造方法 Granted JPS6074434A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58181157A JPS6074434A (ja) 1983-09-29 1983-09-29 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58181157A JPS6074434A (ja) 1983-09-29 1983-09-29 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6074434A true JPS6074434A (ja) 1985-04-26
JPH0544175B2 JPH0544175B2 (show.php) 1993-07-05

Family

ID=16095881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58181157A Granted JPS6074434A (ja) 1983-09-29 1983-09-29 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6074434A (show.php)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856334A (ja) * 1981-09-29 1983-04-04 Fujitsu Ltd 位置合わせマ−ク
JPS58102523A (ja) * 1981-12-15 1983-06-18 Toshiba Corp 位置合わは用マ−カ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856334A (ja) * 1981-09-29 1983-04-04 Fujitsu Ltd 位置合わせマ−ク
JPS58102523A (ja) * 1981-12-15 1983-06-18 Toshiba Corp 位置合わは用マ−カ

Also Published As

Publication number Publication date
JPH0544175B2 (show.php) 1993-07-05

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