JPS6069539A - 表面欠陥検査装置 - Google Patents

表面欠陥検査装置

Info

Publication number
JPS6069539A
JPS6069539A JP17737383A JP17737383A JPS6069539A JP S6069539 A JPS6069539 A JP S6069539A JP 17737383 A JP17737383 A JP 17737383A JP 17737383 A JP17737383 A JP 17737383A JP S6069539 A JPS6069539 A JP S6069539A
Authority
JP
Japan
Prior art keywords
circuit
change
light
level
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17737383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334578B2 (enrdf_load_stackoverflow
Inventor
Masahiko Mochizuki
望月　政彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17737383A priority Critical patent/JPS6069539A/ja
Publication of JPS6069539A publication Critical patent/JPS6069539A/ja
Publication of JPH0334578B2 publication Critical patent/JPH0334578B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP17737383A 1983-09-26 1983-09-26 表面欠陥検査装置 Granted JPS6069539A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17737383A JPS6069539A (ja) 1983-09-26 1983-09-26 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17737383A JPS6069539A (ja) 1983-09-26 1983-09-26 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS6069539A true JPS6069539A (ja) 1985-04-20
JPH0334578B2 JPH0334578B2 (enrdf_load_stackoverflow) 1991-05-23

Family

ID=16029815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17737383A Granted JPS6069539A (ja) 1983-09-26 1983-09-26 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS6069539A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244615A (ja) * 1985-08-22 1987-02-26 Mitsubishi Electric Corp 距離測定装置
JPS62179642A (ja) * 1986-01-31 1987-08-06 Kobe Steel Ltd 表面欠陥検出装置
JPS63106510A (ja) * 1986-10-24 1988-05-11 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
US5329351A (en) * 1992-11-24 1994-07-12 Estek Corporation Particle detection system with coincident detection
JP2002286431A (ja) * 2001-03-27 2002-10-03 Hirose Technology Kk 表面凹凸検査方法および検査装置
WO2023127152A1 (ja) * 2021-12-28 2023-07-06 株式会社ニコン 光学装置および検査方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129988A (ja) * 1974-09-06 1976-03-13 Canon Kk Hyomenkensahoho
JPS5369689A (en) * 1976-12-01 1978-06-21 Ferranti Ltd Inspection apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129988A (ja) * 1974-09-06 1976-03-13 Canon Kk Hyomenkensahoho
JPS5369689A (en) * 1976-12-01 1978-06-21 Ferranti Ltd Inspection apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244615A (ja) * 1985-08-22 1987-02-26 Mitsubishi Electric Corp 距離測定装置
JPS62179642A (ja) * 1986-01-31 1987-08-06 Kobe Steel Ltd 表面欠陥検出装置
JPS63106510A (ja) * 1986-10-24 1988-05-11 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
US5329351A (en) * 1992-11-24 1994-07-12 Estek Corporation Particle detection system with coincident detection
JP2002286431A (ja) * 2001-03-27 2002-10-03 Hirose Technology Kk 表面凹凸検査方法および検査装置
WO2023127152A1 (ja) * 2021-12-28 2023-07-06 株式会社ニコン 光学装置および検査方法

Also Published As

Publication number Publication date
JPH0334578B2 (enrdf_load_stackoverflow) 1991-05-23

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