JPS6059747A - 半導体ウエ−ハの処理装置 - Google Patents

半導体ウエ−ハの処理装置

Info

Publication number
JPS6059747A
JPS6059747A JP58169583A JP16958383A JPS6059747A JP S6059747 A JPS6059747 A JP S6059747A JP 58169583 A JP58169583 A JP 58169583A JP 16958383 A JP16958383 A JP 16958383A JP S6059747 A JPS6059747 A JP S6059747A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
cassette
wafer
receiving
rotating frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58169583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS633455B2 (show.php
Inventor
Takeshi Sakashita
健 坂下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP58169583A priority Critical patent/JPS6059747A/ja
Publication of JPS6059747A publication Critical patent/JPS6059747A/ja
Publication of JPS633455B2 publication Critical patent/JPS633455B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0406—
    • H10P72/3411—
    • H10P72/50—

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP58169583A 1983-09-12 1983-09-12 半導体ウエ−ハの処理装置 Granted JPS6059747A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58169583A JPS6059747A (ja) 1983-09-12 1983-09-12 半導体ウエ−ハの処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58169583A JPS6059747A (ja) 1983-09-12 1983-09-12 半導体ウエ−ハの処理装置

Publications (2)

Publication Number Publication Date
JPS6059747A true JPS6059747A (ja) 1985-04-06
JPS633455B2 JPS633455B2 (show.php) 1988-01-23

Family

ID=15889166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58169583A Granted JPS6059747A (ja) 1983-09-12 1983-09-12 半導体ウエ−ハの処理装置

Country Status (1)

Country Link
JP (1) JPS6059747A (show.php)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327025A (ja) * 1986-07-18 1988-02-04 Nec Kansai Ltd 半導体ウエ−ハの洗浄方法
JPH01104022U (show.php) * 1987-12-28 1989-07-13
CN111092036A (zh) * 2020-03-23 2020-05-01 杭州众硅电子科技有限公司 一种晶圆清洗干燥装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327025A (ja) * 1986-07-18 1988-02-04 Nec Kansai Ltd 半導体ウエ−ハの洗浄方法
JPH01104022U (show.php) * 1987-12-28 1989-07-13
CN111092036A (zh) * 2020-03-23 2020-05-01 杭州众硅电子科技有限公司 一种晶圆清洗干燥装置

Also Published As

Publication number Publication date
JPS633455B2 (show.php) 1988-01-23

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