JPS6041243A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS6041243A JPS6041243A JP14941283A JP14941283A JPS6041243A JP S6041243 A JPS6041243 A JP S6041243A JP 14941283 A JP14941283 A JP 14941283A JP 14941283 A JP14941283 A JP 14941283A JP S6041243 A JPS6041243 A JP S6041243A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- film
- oxide film
- layer
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Formation Of Insulating Films (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14941283A JPS6041243A (ja) | 1983-08-16 | 1983-08-16 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14941283A JPS6041243A (ja) | 1983-08-16 | 1983-08-16 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6041243A true JPS6041243A (ja) | 1985-03-04 |
JPH0152900B2 JPH0152900B2 (ru) | 1989-11-10 |
Family
ID=15474551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14941283A Granted JPS6041243A (ja) | 1983-08-16 | 1983-08-16 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6041243A (ru) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63170046U (ru) * | 1987-04-18 | 1988-11-04 | ||
JPH01259538A (ja) * | 1988-04-11 | 1989-10-17 | Agency Of Ind Science & Technol | 酸化膜の形成方法 |
-
1983
- 1983-08-16 JP JP14941283A patent/JPS6041243A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63170046U (ru) * | 1987-04-18 | 1988-11-04 | ||
JPH01259538A (ja) * | 1988-04-11 | 1989-10-17 | Agency Of Ind Science & Technol | 酸化膜の形成方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0152900B2 (ru) | 1989-11-10 |
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