JPS6037123A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6037123A
JPS6037123A JP58144969A JP14496983A JPS6037123A JP S6037123 A JPS6037123 A JP S6037123A JP 58144969 A JP58144969 A JP 58144969A JP 14496983 A JP14496983 A JP 14496983A JP S6037123 A JPS6037123 A JP S6037123A
Authority
JP
Japan
Prior art keywords
silicide
silicon oxide
oxide film
semiconductor device
tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58144969A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0433130B2 (OSRAM
Inventor
Nobuyoshi Kobayashi
伸好 小林
Shiyoujirou Sugashiro
菅城　象二郎
Seiichi Iwata
誠一 岩田
Naoki Yamamoto
直樹 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58144969A priority Critical patent/JPS6037123A/ja
Publication of JPS6037123A publication Critical patent/JPS6037123A/ja
Publication of JPH0433130B2 publication Critical patent/JPH0433130B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/011—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP58144969A 1983-08-10 1983-08-10 半導体装置の製造方法 Granted JPS6037123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58144969A JPS6037123A (ja) 1983-08-10 1983-08-10 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58144969A JPS6037123A (ja) 1983-08-10 1983-08-10 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6037123A true JPS6037123A (ja) 1985-02-26
JPH0433130B2 JPH0433130B2 (OSRAM) 1992-06-02

Family

ID=15374402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58144969A Granted JPS6037123A (ja) 1983-08-10 1983-08-10 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6037123A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61212040A (ja) * 1985-03-18 1986-09-20 Hitachi Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61212040A (ja) * 1985-03-18 1986-09-20 Hitachi Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0433130B2 (OSRAM) 1992-06-02

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