JPS6033750U - 電子顕微鏡用軸合せ装置 - Google Patents

電子顕微鏡用軸合せ装置

Info

Publication number
JPS6033750U
JPS6033750U JP5378884U JP5378884U JPS6033750U JP S6033750 U JPS6033750 U JP S6033750U JP 5378884 U JP5378884 U JP 5378884U JP 5378884 U JP5378884 U JP 5378884U JP S6033750 U JPS6033750 U JP S6033750U
Authority
JP
Japan
Prior art keywords
electron beam
deflection
electron microscope
electron
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5378884U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6115572Y2 (enrdf_load_html_response
Inventor
内海　博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP5378884U priority Critical patent/JPS6033750U/ja
Publication of JPS6033750U publication Critical patent/JPS6033750U/ja
Application granted granted Critical
Publication of JPS6115572Y2 publication Critical patent/JPS6115572Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP5378884U 1984-04-12 1984-04-12 電子顕微鏡用軸合せ装置 Granted JPS6033750U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5378884U JPS6033750U (ja) 1984-04-12 1984-04-12 電子顕微鏡用軸合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5378884U JPS6033750U (ja) 1984-04-12 1984-04-12 電子顕微鏡用軸合せ装置

Publications (2)

Publication Number Publication Date
JPS6033750U true JPS6033750U (ja) 1985-03-07
JPS6115572Y2 JPS6115572Y2 (enrdf_load_html_response) 1986-05-14

Family

ID=30184131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5378884U Granted JPS6033750U (ja) 1984-04-12 1984-04-12 電子顕微鏡用軸合せ装置

Country Status (1)

Country Link
JP (1) JPS6033750U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003197142A (ja) * 2001-12-26 2003-07-11 National Institute For Materials Science 透過電子顕微鏡の軸調整方法およびその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003197142A (ja) * 2001-12-26 2003-07-11 National Institute For Materials Science 透過電子顕微鏡の軸調整方法およびその装置

Also Published As

Publication number Publication date
JPS6115572Y2 (enrdf_load_html_response) 1986-05-14

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