JPS6033750U - Alignment device for electron microscope - Google Patents
Alignment device for electron microscopeInfo
- Publication number
- JPS6033750U JPS6033750U JP5378884U JP5378884U JPS6033750U JP S6033750 U JPS6033750 U JP S6033750U JP 5378884 U JP5378884 U JP 5378884U JP 5378884 U JP5378884 U JP 5378884U JP S6033750 U JPS6033750 U JP S6033750U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- deflection
- electron microscope
- electron
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例装置を示す略図、第２図及び
第３図は本考案の動作を説明するための略図、第４図及
び第５図は夫々第１図の装置に使用される偏向電源の構
成を示す略図である。
４・・・・・・試料、１２・・・・・・倍率制御回路、
１３ａ。
１３ｂ・・・・・・偏向コイル、１４・・・・・・偏向
電源、１５・・・・・・操作部、１６・・・・・・パル
ス発振器、１７：・・・・・計数回路、１８・・・・・
・ＤＡ変換器。Fig. 1 is a schematic diagram showing an embodiment of the device of the present invention, Figs. 2 and 3 are schematic diagrams for explaining the operation of the present invention, and Figs. 4 and 5 are used for the device of Fig. 1, respectively. 2 is a schematic diagram showing the configuration of a deflection power source. 4... Sample, 12... Magnification control circuit,
13a. 13b: Deflection coil, 14: Deflection power supply, 15: Operation unit, 16: Pulse oscillator, 17: Counting circuit, 18...
・DA converter.
Claims (1)
ンズ、前記電子線と試料との間に設けられた軸合せ用電
子線偏向コイルと偏向電源、前記試料を透過した電子線
を結像させるための結像レンズ系、及び該結像レンズ系
による結像倍率を制御する倍率制御手段を有する電子顕
微鏡において、前記偏向電源の出力を可変する操作手段
に対する単位操作時間当りに変化する電子線偏向量が結
像倍率の増加に伴って減少するように前記偏向電源を制
御するための手段を具備したことを特徴とする電子顕微
鏡用軸合せ装置。A focusing lens that focuses the electron beam generated from the electron gun onto the sample, an electron beam deflection coil and a deflection power source for axis alignment provided between the electron beam and the sample, and an image of the electron beam that has passed through the sample. In an electron microscope, the electron microscope has an imaging lens system and a magnification control means for controlling the imaging magnification of the imaging lens system, wherein the electron beam deflection changes per unit operation time for the operation means for varying the output of the deflection power supply. An alignment device for an electron microscope, comprising means for controlling the deflection power source so that the deflection amount decreases as the imaging magnification increases.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5378884U JPS6033750U (en) | 1984-04-12 | 1984-04-12 | Alignment device for electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5378884U JPS6033750U (en) | 1984-04-12 | 1984-04-12 | Alignment device for electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6033750U true JPS6033750U (en) | 1985-03-07 |
| JPS6115572Y2 JPS6115572Y2 (en) | 1986-05-14 |
Family
ID=30184131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5378884U Granted JPS6033750U (en) | 1984-04-12 | 1984-04-12 | Alignment device for electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6033750U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003197142A (en) * | 2001-12-26 | 2003-07-11 | National Institute For Materials Science | Axis adjustment method for transmission type electron microscope and its device |
-
1984
- 1984-04-12 JP JP5378884U patent/JPS6033750U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003197142A (en) * | 2001-12-26 | 2003-07-11 | National Institute For Materials Science | Axis adjustment method for transmission type electron microscope and its device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6115572Y2 (en) | 1986-05-14 |
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