JPS59165658U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS59165658U JPS59165658U JP5930083U JP5930083U JPS59165658U JP S59165658 U JPS59165658 U JP S59165658U JP 5930083 U JP5930083 U JP 5930083U JP 5930083 U JP5930083 U JP 5930083U JP S59165658 U JPS59165658 U JP S59165658U
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- focusing
- scanning
- scanning electron
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の走査電子顕微鏡の構成を示す略図、第２
図及び第３図は第１図の装置の動作を示す略図である。
第４図は本考案の一実施例を示す略図、第５図及び第６
図は第４図の装置の動作を示す略図である。
′１：電子線、２：レンズ、３：試料、４：検出器、５
：アンプ、６：陰極線管、７：倍率回路、８：走査信号
回路、９ｘ、９ｙ、１０ｘ、１０ｙ：偏向コイル１．１
１：文字表示回路、１２：比較回路、１３：基準信号回
路、１４：制限視野像、１５：’ｉ字字表領領域１６：
Ｌ／ンズコイル、１７：電源。
第２図 パ−
第５図Figure 1 is a schematic diagram showing the configuration of a conventional scanning electron microscope;
3 and 3 are schematic diagrams illustrating the operation of the apparatus of FIG. 1. Figure 4 is a schematic diagram showing one embodiment of the present invention, Figures 5 and 6
The figure is a schematic diagram illustrating the operation of the apparatus of FIG. 4. '1: Electron beam, 2: Lens, 3: Sample, 4: Detector, 5
: Amplifier, 6: Cathode ray tube, 7: Magnification circuit, 8: Scanning signal circuit, 9x, 9y, 10x, 10y: Deflection coil 1.1
1: Character display circuit, 12: Comparison circuit, 13: Reference signal circuit, 14: Selected field image, 15: 'I-shaped surface area 16:
L/ns coil, 17: Power supply. Fig. 2 Part - Fig. 5
Claims (1)
の試料照射位置を走査信号によって二次元的に走査する
手段、前記走査信号を任意に設定される基準信号と比較
する比較回路、及び該比較回路からの信号に応じて前記
集束手段による電子線の集束状態を２段階に切換る手段
を具備したことを特徴とする走査電子顕微鏡。a focusing means for focusing an electron beam that irradiates a sample; a means for two-dimensionally scanning a sample irradiation position with the electron beam using a scanning signal; a comparison circuit that compares the scanning signal with an arbitrarily set reference signal; A scanning electron microscope characterized by comprising means for switching the focusing state of the electron beam by the focusing means into two stages according to a signal from a comparison circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5930083U JPS59165658U (en) | 1983-04-20 | 1983-04-20 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5930083U JPS59165658U (en) | 1983-04-20 | 1983-04-20 | scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59165658U true JPS59165658U (en) | 1984-11-06 |
Family
ID=30189551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5930083U Pending JPS59165658U (en) | 1983-04-20 | 1983-04-20 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59165658U (en) |
-
1983
- 1983-04-20 JP JP5930083U patent/JPS59165658U/en active Pending
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