JPS58160460U - electron beam equipment - Google Patents
electron beam equipmentInfo
- Publication number
- JPS58160460U JPS58160460U JP5829482U JP5829482U JPS58160460U JP S58160460 U JPS58160460 U JP S58160460U JP 5829482 U JP5829482 U JP 5829482U JP 5829482 U JP5829482 U JP 5829482U JP S58160460 U JPS58160460 U JP S58160460U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- sample
- point
- signal
- counting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示すための図、第２図は第
１図に示した一実施例装置の回路素子よりの出力信号を
例示するための図、第３図はＣＲＴ画面に表示される試
料像と輝点とを例示するための図である。
１：電子銃、２：集束レンズ、３：対物レンズ、４Ｘ、
４Ｙ：偏向コイル、５：試料、６：分光結晶、７：
Ｘ線検出器、８：２次電子検出器、９Ｘ、 ９Ｙ：走
査信号表出器、ＩＯＸ、ＩＯＹ：切換回路、１４：ＣＲ
Ｔ、 １６Ｘ、 １６Ｙ：可変信号源、１７：輝点表
示回路、１８Ｘ、１８Ｙ：比較器、１９：アンド回路、
２０：加算回路、２５：ゲート回路、２６：カウンタ、
２７：タイマー、２８：切換信号作成回路。Fig. 1 is a diagram showing an embodiment of the present invention, Fig. 2 is a diagram illustrating output signals from the circuit elements of the embodiment shown in Fig. 1, and Fig. 3 is a CRT screen. FIG. 3 is a diagram for illustrating a sample image and bright spots displayed in FIG. 1: Electron gun, 2: Focusing lens, 3: Objective lens, 4X,
4Y: Deflection coil, 5: Sample, 6: Spectroscopic crystal, 7:
X-ray detector, 8: Secondary electron detector, 9X, 9Y: Scanning signal expressor, IOX, IOY: Switching circuit, 14: CR
T, 16X, 16Y: variable signal source, 17: bright spot display circuit, 18X, 18Y: comparator, 19: AND circuit,
20: addition circuit, 25: gate circuit, 26: counter,
27: Timer, 28: Switching signal generation circuit.
Claims (1)
２次元的に走査し、その際試料より発生した２次電子を
前記走査と同期走査されている陰極線管に導いて試料像
を表示する手段と、電子線の照射によって試料より発生
したＸ線のうち特定波長のものを選択的に検出して計数
する手段とを備えた装置において、前記偏向器に前記陰
極線管のブランキング期間毎に電子線を試料面上の一点
に照射するための直流信号を前記走査信号に切換えて供
給する手段と、電子線が試料面上の前記一点に照射され
る期間のみ試料より発生したＸ線を計数する手段と、前
記試料面上の一点に対応する陰極線管面上の点を他の点
と弁別して表示する手段と、前記直流信号を可変する手
段とを具備する電子線装置。A scanning signal is supplied to the deflector to scan the electron beam two-dimensionally on the sample surface, and the secondary electrons generated from the sample at this time are guided to a cathode ray tube that is scanned in synchronization with the scanning to display the sample image. and means for selectively detecting and counting X-rays of a specific wavelength among the X-rays generated from the sample by electron beam irradiation, means for switching and supplying the DC signal to the scanning signal for irradiating the electron beam to one point on the sample surface; An electron beam apparatus comprising: means for counting; means for displaying a point on a cathode ray tube surface corresponding to one point on the sample surface while distinguishing it from other points; and means for varying the DC signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5829482U JPS58160460U (en) | 1982-04-21 | 1982-04-21 | electron beam equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5829482U JPS58160460U (en) | 1982-04-21 | 1982-04-21 | electron beam equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58160460U true JPS58160460U (en) | 1983-10-26 |
Family
ID=30068691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5829482U Pending JPS58160460U (en) | 1982-04-21 | 1982-04-21 | electron beam equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58160460U (en) |
-
1982
- 1982-04-21 JP JP5829482U patent/JPS58160460U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4091374A (en) | Method for pictorially displaying output information generated by an object imaging apparatus | |
| JPS58160460U (en) | electron beam equipment | |
| GB1315945A (en) | Electron microscopes and microanalysers | |
| JPS59150155U (en) | scanning electron microscope | |
| JPS60138252U (en) | Sample image display device in particle beam equipment | |
| JPS6166860U (en) | ||
| JPH0139393Y2 (en) | ||
| JPS5827621B2 (en) | scanning electron microscope | |
| JPS616252U (en) | electron beam equipment | |
| JPH024442Y2 (en) | ||
| JPS55151757A (en) | Image display for scanning type transmission electron microscope | |
| EP0358987A3 (en) | Display apparatus with a cathode ray tube and a device for measuring the beam circuit | |
| JPH0139394Y2 (en) | ||
| JPH01186743A (en) | Electric field emission type scanning electron microscope | |
| JPS5732557A (en) | Scan electron microscope | |
| JPS5581455A (en) | Observing method for crossover image of electron gun | |
| JPS6056344A (en) | Scanning type reflecting electron diffraction microscope apparatus | |
| JPS61151959A (en) | Scanning electron microscope | |
| JPS59134366U (en) | scanning electron microscope | |
| JPS59181575U (en) | Analysis or observation position display device in electron beam equipment | |
| JPS59153154A (en) | Electron beam analytical method and apparatus | |
| JPS59138162U (en) | scanning electron microscope | |
| JPS59165658U (en) | scanning electron microscope | |
| JPS62128420A (en) | Scanning electron microscope | |
| JPS59134259U (en) | scanning electron microscope |