JPS5931145U - Electron beam deflector - Google Patents
Electron beam deflectorInfo
- Publication number
- JPS5931145U JPS5931145U JP12500682U JP12500682U JPS5931145U JP S5931145 U JPS5931145 U JP S5931145U JP 12500682 U JP12500682 U JP 12500682U JP 12500682 U JP12500682 U JP 12500682U JP S5931145 U JPS5931145 U JP S5931145U
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- electron beam
- beam deflector
- coils
- control power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の偏向装置の構成図、第２図は本考案の一
実施例の構成図を示す。
１・・・・・・電子線、２・・・・・・上部偏向コイル
、３・・・・・・下部偏向コイル、４．４′・・・・・
・制御電源、５・・・・・・偏向支点変更回路、６・・
・・・・入力回路。FIG. 1 is a block diagram of a conventional deflection device, and FIG. 2 is a block diagram of an embodiment of the present invention. 1... Electron beam, 2... Upper deflection coil, 3... Lower deflection coil, 4.4'...
・Control power supply, 5... Deflection fulcrum change circuit, 6...
...Input circuit.
Claims (1)
において、各々偏向コイルに独立に制御電源を設け、入
力信号で偏向コイルに流す電流比を変え、偏向支点を任
意に選べるようにしたことを特徴とする電子線偏向装置
。In a charged particle beam deflection device with multiple deflection coils installed in the axial direction, each deflection coil is provided with an independent control power source, and the current ratio flowing through the deflection coils is changed using an input signal, so that the deflection fulcrum can be arbitrarily selected. An electron beam deflection device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12500682U JPS5931145U (en) | 1982-08-20 | 1982-08-20 | Electron beam deflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12500682U JPS5931145U (en) | 1982-08-20 | 1982-08-20 | Electron beam deflector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5931145U true JPS5931145U (en) | 1984-02-27 |
Family
ID=30284770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12500682U Pending JPS5931145U (en) | 1982-08-20 | 1982-08-20 | Electron beam deflector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5931145U (en) |
-
1982
- 1982-08-20 JP JP12500682U patent/JPS5931145U/en active Pending
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