JPS6027178A - ジョセフソン効果素子の製造方法 - Google Patents
ジョセフソン効果素子の製造方法Info
- Publication number
- JPS6027178A JPS6027178A JP58134193A JP13419383A JPS6027178A JP S6027178 A JPS6027178 A JP S6027178A JP 58134193 A JP58134193 A JP 58134193A JP 13419383 A JP13419383 A JP 13419383A JP S6027178 A JPS6027178 A JP S6027178A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- superconductor
- josephson
- junction
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005668 Josephson effect Effects 0.000 title claims description 11
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 4
- 239000002887 superconductor Substances 0.000 claims description 21
- 239000004020 conductor Substances 0.000 claims description 2
- 244000061354 Manilkara achras Species 0.000 claims 1
- 230000010354 integration Effects 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58134193A JPS6027178A (ja) | 1983-07-22 | 1983-07-22 | ジョセフソン効果素子の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58134193A JPS6027178A (ja) | 1983-07-22 | 1983-07-22 | ジョセフソン効果素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6027178A true JPS6027178A (ja) | 1985-02-12 |
JPH0546112B2 JPH0546112B2 (enrdf_load_stackoverflow) | 1993-07-13 |
Family
ID=15122604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58134193A Granted JPS6027178A (ja) | 1983-07-22 | 1983-07-22 | ジョセフソン効果素子の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6027178A (enrdf_load_stackoverflow) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5471999A (en) * | 1977-11-19 | 1979-06-08 | Rikagaku Kenkyusho | Josephson effect element and method of fabricating same |
JPS57196589A (en) * | 1981-05-28 | 1982-12-02 | Seiko Epson Corp | Manufacture of nonlinear element |
JPS59182586A (ja) * | 1983-04-01 | 1984-10-17 | Nippon Telegr & Teleph Corp <Ntt> | ジヨセフソン接合素子 |
-
1983
- 1983-07-22 JP JP58134193A patent/JPS6027178A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5471999A (en) * | 1977-11-19 | 1979-06-08 | Rikagaku Kenkyusho | Josephson effect element and method of fabricating same |
JPS57196589A (en) * | 1981-05-28 | 1982-12-02 | Seiko Epson Corp | Manufacture of nonlinear element |
JPS59182586A (ja) * | 1983-04-01 | 1984-10-17 | Nippon Telegr & Teleph Corp <Ntt> | ジヨセフソン接合素子 |
Also Published As
Publication number | Publication date |
---|---|
JPH0546112B2 (enrdf_load_stackoverflow) | 1993-07-13 |
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