JPS60263845A - ガス検出素子とその製造方法 - Google Patents
ガス検出素子とその製造方法Info
- Publication number
- JPS60263845A JPS60263845A JP11980784A JP11980784A JPS60263845A JP S60263845 A JPS60263845 A JP S60263845A JP 11980784 A JP11980784 A JP 11980784A JP 11980784 A JP11980784 A JP 11980784A JP S60263845 A JPS60263845 A JP S60263845A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- antimony
- detection element
- gas detection
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 28
- 238000001514 detection method Methods 0.000 claims abstract description 27
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 19
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 claims abstract description 16
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 13
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910000077 silane Inorganic materials 0.000 claims abstract description 10
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 6
- 239000004065 semiconductor Substances 0.000 claims abstract description 6
- 239000002253 acid Substances 0.000 claims abstract description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims description 10
- 230000003647 oxidation Effects 0.000 claims description 10
- 238000007254 oxidation reaction Methods 0.000 claims description 10
- 238000010304 firing Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 150000001463 antimony compounds Chemical class 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 4
- 239000000243 solution Substances 0.000 claims description 3
- LIYKJALVRPGQTR-UHFFFAOYSA-M oxostibanylium;chloride Chemical compound [Cl-].[Sb+]=O LIYKJALVRPGQTR-UHFFFAOYSA-M 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims 2
- 239000003960 organic solvent Substances 0.000 claims 2
- 239000003054 catalyst Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 239000003381 stabilizer Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 abstract description 22
- 230000032683 aging Effects 0.000 abstract description 3
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 abstract description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract 3
- 230000002269 spontaneous effect Effects 0.000 abstract 2
- 229910052718 tin Inorganic materials 0.000 abstract 2
- -1 for example Chemical compound 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 94
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 4
- 229910052573 porcelain Inorganic materials 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000004570 mortar (masonry) Substances 0.000 description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 238000002525 ultrasonication Methods 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000001282 iso-butane Substances 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- PDWVXNLUDMQFCH-UHFFFAOYSA-N oxoantimony;hydrochloride Chemical compound Cl.[Sb]=O PDWVXNLUDMQFCH-UHFFFAOYSA-N 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11980784A JPS60263845A (ja) | 1984-06-13 | 1984-06-13 | ガス検出素子とその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11980784A JPS60263845A (ja) | 1984-06-13 | 1984-06-13 | ガス検出素子とその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60263845A true JPS60263845A (ja) | 1985-12-27 |
| JPH0418258B2 JPH0418258B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-03-27 |
Family
ID=14770709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11980784A Granted JPS60263845A (ja) | 1984-06-13 | 1984-06-13 | ガス検出素子とその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60263845A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62197755A (ja) * | 1986-02-26 | 1987-09-01 | Agency Of Ind Science & Technol | ガスセンサ−用酸化物半導体薄膜の製造法 |
| JPS62207945A (ja) * | 1986-03-08 | 1987-09-12 | Shimizu Constr Co Ltd | ガス漏れ検知装置 |
| JP2004003915A (ja) * | 2002-03-29 | 2004-01-08 | Ngk Spark Plug Co Ltd | ガスセンサの熱処理方法、及びそれを用いたガスセンサの製造方法及び検査方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4953497A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-09-22 | 1974-05-24 | ||
| JPS5349493A (en) * | 1976-10-18 | 1978-05-04 | Saito Noboru | Gas detecting element composed of oxide semiconductor |
| JPS53143298A (en) * | 1977-05-19 | 1978-12-13 | Nohmi Bosai Kogyo Co Ltd | Carbon monoxide sensor element |
| JPS5499697A (en) * | 1978-01-24 | 1979-08-06 | Asahi Glass Co Ltd | Gas sensing body for reductive gas |
| JPS54112179A (en) * | 1978-02-23 | 1979-09-01 | Sony Corp | Semiconductor device |
| JPS54121795A (en) * | 1978-03-15 | 1979-09-21 | Fujitsu Ltd | Production of gas detecting element material |
-
1984
- 1984-06-13 JP JP11980784A patent/JPS60263845A/ja active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4953497A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-09-22 | 1974-05-24 | ||
| JPS5349493A (en) * | 1976-10-18 | 1978-05-04 | Saito Noboru | Gas detecting element composed of oxide semiconductor |
| JPS53143298A (en) * | 1977-05-19 | 1978-12-13 | Nohmi Bosai Kogyo Co Ltd | Carbon monoxide sensor element |
| JPS5499697A (en) * | 1978-01-24 | 1979-08-06 | Asahi Glass Co Ltd | Gas sensing body for reductive gas |
| JPS54112179A (en) * | 1978-02-23 | 1979-09-01 | Sony Corp | Semiconductor device |
| JPS54121795A (en) * | 1978-03-15 | 1979-09-21 | Fujitsu Ltd | Production of gas detecting element material |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62197755A (ja) * | 1986-02-26 | 1987-09-01 | Agency Of Ind Science & Technol | ガスセンサ−用酸化物半導体薄膜の製造法 |
| JPS62207945A (ja) * | 1986-03-08 | 1987-09-12 | Shimizu Constr Co Ltd | ガス漏れ検知装置 |
| JP2004003915A (ja) * | 2002-03-29 | 2004-01-08 | Ngk Spark Plug Co Ltd | ガスセンサの熱処理方法、及びそれを用いたガスセンサの製造方法及び検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0418258B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-03-27 |
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