JPS60261107A - 厚膜型正特性半導体素子の製造方法 - Google Patents

Info

Publication number

JPS60261107A

JPS60261107A JP11702184A JP11702184A JPS60261107A JP S60261107 A JPS60261107 A JP S60261107A JP 11702184 A JP11702184 A JP 11702184A JP 11702184 A JP11702184 A JP 11702184A JP S60261107 A JPS60261107 A JP S60261107A

Authority

JP

Japan

Prior art keywords

thick film

semiconductor element

positive temperature

temperature coefficient

glass frit

Prior art date

1984-06-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 239000004065 semiconductor Substances 0.000 title claims description 31
• 238000000034 method Methods 0.000 title claims description 10
• 239000000843 powder Substances 0.000 claims description 20
• 239000000203 mixture Substances 0.000 claims description 12
• 229910002113 barium titanate Inorganic materials 0.000 claims description 8
• 238000004519 manufacturing process Methods 0.000 claims description 8
• 239000000758 substrate Substances 0.000 claims description 7
• 238000010304 firing Methods 0.000 claims description 5
• 239000010408 film Substances 0.000 description 19
• 239000011521 glass Substances 0.000 description 17
• 238000010438 heat treatment Methods 0.000 description 12
• 239000002482 conductive additive Substances 0.000 description 7
• 239000002245 particle Substances 0.000 description 4
• 230000035939 shock Effects 0.000 description 4
• WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 3
• 238000007650 screen-printing Methods 0.000 description 3
• OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 2
• 229940088601 alpha-terpineol Drugs 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 239000002184 metal Substances 0.000 description 2
• ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
• VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
• 239000000654 additive Substances 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 239000004020 conductor Substances 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 229910052593 corundum Inorganic materials 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000006260 foam Substances 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 238000000465 moulding Methods 0.000 description 1
• 239000003960 organic solvent Substances 0.000 description 1
• 239000002904 solvent Substances 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1
• 238000007738 vacuum evaporation Methods 0.000 description 1
• 229910001845 yogo sapphire Inorganic materials 0.000 description 1