JPS60251637A - 薄形集積回路の姿勢補正装置 - Google Patents

薄形集積回路の姿勢補正装置

Info

Publication number
JPS60251637A
JPS60251637A JP59107621A JP10762184A JPS60251637A JP S60251637 A JPS60251637 A JP S60251637A JP 59107621 A JP59107621 A JP 59107621A JP 10762184 A JP10762184 A JP 10762184A JP S60251637 A JPS60251637 A JP S60251637A
Authority
JP
Japan
Prior art keywords
positioning
thin
positioning elements
positioning member
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59107621A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0340941B2 (enExample
Inventor
Tomoyoshi Maniwa
真庭　友由
Shinpei Suzuki
鈴木　新平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP59107621A priority Critical patent/JPS60251637A/ja
Publication of JPS60251637A publication Critical patent/JPS60251637A/ja
Publication of JPH0340941B2 publication Critical patent/JPH0340941B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Control Of Position Or Direction (AREA)
JP59107621A 1984-05-29 1984-05-29 薄形集積回路の姿勢補正装置 Granted JPS60251637A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59107621A JPS60251637A (ja) 1984-05-29 1984-05-29 薄形集積回路の姿勢補正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59107621A JPS60251637A (ja) 1984-05-29 1984-05-29 薄形集積回路の姿勢補正装置

Publications (2)

Publication Number Publication Date
JPS60251637A true JPS60251637A (ja) 1985-12-12
JPH0340941B2 JPH0340941B2 (enExample) 1991-06-20

Family

ID=14463819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59107621A Granted JPS60251637A (ja) 1984-05-29 1984-05-29 薄形集積回路の姿勢補正装置

Country Status (1)

Country Link
JP (1) JPS60251637A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952485U (ja) * 1982-09-29 1984-04-06 利昌工業株式会社 半導体試験用基板

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952485U (ja) * 1982-09-29 1984-04-06 利昌工業株式会社 半導体試験用基板

Also Published As

Publication number Publication date
JPH0340941B2 (enExample) 1991-06-20

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