JPS60245142A - 半導体装置用ハンドリング装置 - Google Patents

半導体装置用ハンドリング装置

Info

Publication number
JPS60245142A
JPS60245142A JP59101436A JP10143684A JPS60245142A JP S60245142 A JPS60245142 A JP S60245142A JP 59101436 A JP59101436 A JP 59101436A JP 10143684 A JP10143684 A JP 10143684A JP S60245142 A JPS60245142 A JP S60245142A
Authority
JP
Japan
Prior art keywords
holder
semiconductor device
handling apparatus
electrically
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59101436A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0422335B2 (enrdf_load_stackoverflow
Inventor
Ryozo Fujiwara
藤原　良造
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP59101436A priority Critical patent/JPS60245142A/ja
Publication of JPS60245142A publication Critical patent/JPS60245142A/ja
Publication of JPH0422335B2 publication Critical patent/JPH0422335B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP59101436A 1984-05-19 1984-05-19 半導体装置用ハンドリング装置 Granted JPS60245142A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59101436A JPS60245142A (ja) 1984-05-19 1984-05-19 半導体装置用ハンドリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59101436A JPS60245142A (ja) 1984-05-19 1984-05-19 半導体装置用ハンドリング装置

Publications (2)

Publication Number Publication Date
JPS60245142A true JPS60245142A (ja) 1985-12-04
JPH0422335B2 JPH0422335B2 (enrdf_load_stackoverflow) 1992-04-16

Family

ID=14300638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59101436A Granted JPS60245142A (ja) 1984-05-19 1984-05-19 半導体装置用ハンドリング装置

Country Status (1)

Country Link
JP (1) JPS60245142A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0422335B2 (enrdf_load_stackoverflow) 1992-04-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term