JPS60206104A - 厚膜型正特性半導体素子の製造方法 - Google Patents
厚膜型正特性半導体素子の製造方法Info
- Publication number
- JPS60206104A JPS60206104A JP6402084A JP6402084A JPS60206104A JP S60206104 A JPS60206104 A JP S60206104A JP 6402084 A JP6402084 A JP 6402084A JP 6402084 A JP6402084 A JP 6402084A JP S60206104 A JPS60206104 A JP S60206104A
- Authority
- JP
- Japan
- Prior art keywords
- thick film
- powder
- glass frit
- temperature coefficient
- positive temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 31
- 238000000034 method Methods 0.000 title claims description 10
- 239000000843 powder Substances 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 229910005347 FeSi Inorganic materials 0.000 claims description 6
- 238000010304 firing Methods 0.000 claims description 5
- 229910017384 Fe3Si Inorganic materials 0.000 claims description 4
- 239000011521 glass Substances 0.000 description 18
- 239000010408 film Substances 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 11
- 239000002482 conductive additive Substances 0.000 description 7
- 229910005331 FeSi2 Inorganic materials 0.000 description 4
- 229910002113 barium titanate Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 3
- 229910015364 Fe5Si3 Inorganic materials 0.000 description 3
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 3
- 229940088601 alpha-terpineol Drugs 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910019704 Nb2O Inorganic materials 0.000 description 1
- 229910010252 TiO3 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6402084A JPS60206104A (ja) | 1984-03-30 | 1984-03-30 | 厚膜型正特性半導体素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6402084A JPS60206104A (ja) | 1984-03-30 | 1984-03-30 | 厚膜型正特性半導体素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60206104A true JPS60206104A (ja) | 1985-10-17 |
| JPH0558243B2 JPH0558243B2 (enrdf_load_stackoverflow) | 1993-08-26 |
Family
ID=13246056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6402084A Granted JPS60206104A (ja) | 1984-03-30 | 1984-03-30 | 厚膜型正特性半導体素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60206104A (enrdf_load_stackoverflow) |
-
1984
- 1984-03-30 JP JP6402084A patent/JPS60206104A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0558243B2 (enrdf_load_stackoverflow) | 1993-08-26 |
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