JPS60194537A - 整列装置 - Google Patents
整列装置Info
- Publication number
- JPS60194537A JPS60194537A JP60032947A JP3294785A JPS60194537A JP S60194537 A JPS60194537 A JP S60194537A JP 60032947 A JP60032947 A JP 60032947A JP 3294785 A JP3294785 A JP 3294785A JP S60194537 A JPS60194537 A JP S60194537A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- optical path
- optical
- stage
- focusing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 72
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 238000012937 correction Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 79
- 238000000034 method Methods 0.000 description 10
- 238000007689 inspection Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000003909 pattern recognition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 102100031584 Cell division cycle-associated 7-like protein Human genes 0.000 description 1
- 101000777638 Homo sapiens Cell division cycle-associated 7-like protein Proteins 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US58259084A | 1984-02-22 | 1984-02-22 | |
| US582590 | 1984-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60194537A true JPS60194537A (ja) | 1985-10-03 |
Family
ID=24329741
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60032947A Pending JPS60194537A (ja) | 1984-02-22 | 1985-02-22 | 整列装置 |
| JP1990124134U Expired - Lifetime JPH0537476Y2 (enrdf_load_stackoverflow) | 1984-02-22 | 1990-11-26 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990124134U Expired - Lifetime JPH0537476Y2 (enrdf_load_stackoverflow) | 1984-02-22 | 1990-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JPS60194537A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6262538A (ja) * | 1985-09-13 | 1987-03-19 | Toshiba Corp | 位置決め装置 |
| JPH01123346U (enrdf_load_stackoverflow) * | 1988-02-15 | 1989-08-22 | ||
| JP2015226043A (ja) * | 2014-05-30 | 2015-12-14 | 株式会社ディスコ | ウェーハｉｄ読み取り装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5560148B2 (ja) * | 2010-09-14 | 2014-07-23 | 株式会社日立ハイテクノロジーズ | 検査装置、及び位置決め装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57133428A (en) * | 1981-02-12 | 1982-08-18 | Nippon Kogaku Kk <Nikon> | Alignment optical system capable of variable magnification |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54159876A (en) * | 1978-06-07 | 1979-12-18 | Nec Corp | Wafer position detection method and its unit |
| JPS56134741A (en) * | 1980-03-25 | 1981-10-21 | Toshiba Corp | Position detecting device |
| JPS574134A (en) * | 1980-06-10 | 1982-01-09 | Fujitsu Ltd | Recognizing device |
| JPS57167651A (en) * | 1981-04-07 | 1982-10-15 | Mitsubishi Electric Corp | Inspecting device for surface of semiconductor wafer |
| JPS57169251A (en) * | 1981-04-09 | 1982-10-18 | Toshiba Corp | Recognizing device for position |
| JPS57198641A (en) * | 1981-05-30 | 1982-12-06 | Toshiba Corp | Pattern detection |
| JPS5919344A (ja) * | 1982-07-23 | 1984-01-31 | Hitachi Ltd | ２視野光学装置 |
-
1985
- 1985-02-22 JP JP60032947A patent/JPS60194537A/ja active Pending
-
1990
- 1990-11-26 JP JP1990124134U patent/JPH0537476Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57133428A (en) * | 1981-02-12 | 1982-08-18 | Nippon Kogaku Kk <Nikon> | Alignment optical system capable of variable magnification |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6262538A (ja) * | 1985-09-13 | 1987-03-19 | Toshiba Corp | 位置決め装置 |
| JPH01123346U (enrdf_load_stackoverflow) * | 1988-02-15 | 1989-08-22 | ||
| JP2015226043A (ja) * | 2014-05-30 | 2015-12-14 | 株式会社ディスコ | ウェーハｉｄ読み取り装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0373451U (enrdf_load_stackoverflow) | 1991-07-24 |
| JPH0537476Y2 (enrdf_load_stackoverflow) | 1993-09-22 |
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