JPS574134A - Recognizing device - Google Patents
Recognizing deviceInfo
- Publication number
- JPS574134A JPS574134A JP7823580A JP7823580A JPS574134A JP S574134 A JPS574134 A JP S574134A JP 7823580 A JP7823580 A JP 7823580A JP 7823580 A JP7823580 A JP 7823580A JP S574134 A JPS574134 A JP S574134A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- optical system
- pad
- pellet
- recognized material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
- Wire Bonding (AREA)
- Image Analysis (AREA)
Abstract
PURPOSE:To clearly and highly accurately perform the detection of the pattern position for a recognized material by a method wherein an image pickup section, to be used for detecting the pattern position in the recognized material, is consisted of the first optical system to be used for the image pickup of the shape of the recognized material and the second optical system which will be used for image pikcup of the pattern in the recognized material. CONSTITUTION:A hydrid IC whereon an IC chip pellet 20 was placed is arranged on an XY stage 1. On this pellet 20, an IC chip pattern 21 and an IC pad pattern 22 are located, and then the second IC pad pattern 23 is formed on the pattern 21. In this constitution, two optical systems of A and B are provided in order to perform a image pickup for the pattern 21, and the pellet 20 containing the pattern 21 is placed in the visual range in the B optical system 2 and takes in the image information of the pattern 21. Also, in the A optical system 3, image information for the second IC pad pattern 23 is taken in and the position of the bonding pad is detected by cooperating the two optical systems of 2 and 3.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7823580A JPS574134A (en) | 1980-06-10 | 1980-06-10 | Recognizing device |
US06/272,368 US4450579A (en) | 1980-06-10 | 1981-06-10 | Recognition method and apparatus |
DE8181302575T DE3175773D1 (en) | 1980-06-10 | 1981-06-10 | Pattern position recognition apparatus |
EP81302575A EP0041870B1 (en) | 1980-06-10 | 1981-06-10 | Pattern position recognition apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7823580A JPS574134A (en) | 1980-06-10 | 1980-06-10 | Recognizing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS574134A true JPS574134A (en) | 1982-01-09 |
Family
ID=13656372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7823580A Pending JPS574134A (en) | 1980-06-10 | 1980-06-10 | Recognizing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS574134A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57196377A (en) * | 1981-05-27 | 1982-12-02 | Hitachi Ltd | Pattern recognizing method |
JPS61161583A (en) * | 1985-01-09 | 1986-07-22 | Matsushita Electric Ind Co Ltd | Pattern recognizing device |
JPS61161582A (en) * | 1985-01-09 | 1986-07-22 | Matsushita Electric Ind Co Ltd | Pattern recognizing device |
JPS63167981A (en) * | 1986-12-29 | 1988-07-12 | Matsushita Electric Ind Co Ltd | Pattern recognizing device |
JPH0373451U (en) * | 1984-02-22 | 1991-07-24 |
-
1980
- 1980-06-10 JP JP7823580A patent/JPS574134A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57196377A (en) * | 1981-05-27 | 1982-12-02 | Hitachi Ltd | Pattern recognizing method |
JPH0373451U (en) * | 1984-02-22 | 1991-07-24 | ||
JPH0537476Y2 (en) * | 1984-02-22 | 1993-09-22 | ||
JPS61161583A (en) * | 1985-01-09 | 1986-07-22 | Matsushita Electric Ind Co Ltd | Pattern recognizing device |
JPS61161582A (en) * | 1985-01-09 | 1986-07-22 | Matsushita Electric Ind Co Ltd | Pattern recognizing device |
JPS63167981A (en) * | 1986-12-29 | 1988-07-12 | Matsushita Electric Ind Co Ltd | Pattern recognizing device |
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