JPS60160155A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS60160155A
JPS60160155A JP59014633A JP1463384A JPS60160155A JP S60160155 A JPS60160155 A JP S60160155A JP 59014633 A JP59014633 A JP 59014633A JP 1463384 A JP1463384 A JP 1463384A JP S60160155 A JPS60160155 A JP S60160155A
Authority
JP
Japan
Prior art keywords
film
insulating film
electrode
insulating
capacitance element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59014633A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0367346B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yasuaki Hokari
穂苅　泰明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP59014633A priority Critical patent/JPS60160155A/ja
Publication of JPS60160155A publication Critical patent/JPS60160155A/ja
Publication of JPH0367346B2 publication Critical patent/JPH0367346B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP59014633A 1984-01-30 1984-01-30 半導体装置の製造方法 Granted JPS60160155A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59014633A JPS60160155A (ja) 1984-01-30 1984-01-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59014633A JPS60160155A (ja) 1984-01-30 1984-01-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60160155A true JPS60160155A (ja) 1985-08-21
JPH0367346B2 JPH0367346B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-22

Family

ID=11866596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59014633A Granted JPS60160155A (ja) 1984-01-30 1984-01-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60160155A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62128167A (ja) * 1985-11-29 1987-06-10 Hitachi Ltd キャパシタの製造方法
US4813626A (en) * 1986-11-17 1989-03-21 Ryobi Limited Drag control device in spinning type fishing reel
US4943012A (en) * 1987-02-09 1990-07-24 Ryobi Ltd. Double bearing fishing reel
JPH04359557A (ja) * 1991-06-06 1992-12-11 Nec Corp 半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107838A (ja) * 1983-11-17 1985-06-13 Nec Corp 半導体装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107838A (ja) * 1983-11-17 1985-06-13 Nec Corp 半導体装置の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62128167A (ja) * 1985-11-29 1987-06-10 Hitachi Ltd キャパシタの製造方法
US4813626A (en) * 1986-11-17 1989-03-21 Ryobi Limited Drag control device in spinning type fishing reel
US4943012A (en) * 1987-02-09 1990-07-24 Ryobi Ltd. Double bearing fishing reel
JPH04359557A (ja) * 1991-06-06 1992-12-11 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0367346B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-22

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