JPS60154574A - 圧覚センサ - Google Patents

圧覚センサ

Info

Publication number
JPS60154574A
JPS60154574A JP59009796A JP979684A JPS60154574A JP S60154574 A JPS60154574 A JP S60154574A JP 59009796 A JP59009796 A JP 59009796A JP 979684 A JP979684 A JP 979684A JP S60154574 A JPS60154574 A JP S60154574A
Authority
JP
Japan
Prior art keywords
pressure
support
pressure receiving
receiving structure
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59009796A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0560268B2 (enExample
Inventor
Kimii Sumino
角野　公威
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59009796A priority Critical patent/JPS60154574A/ja
Publication of JPS60154574A publication Critical patent/JPS60154574A/ja
Publication of JPH0560268B2 publication Critical patent/JPH0560268B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59009796A 1984-01-23 1984-01-23 圧覚センサ Granted JPS60154574A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59009796A JPS60154574A (ja) 1984-01-23 1984-01-23 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59009796A JPS60154574A (ja) 1984-01-23 1984-01-23 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60154574A true JPS60154574A (ja) 1985-08-14
JPH0560268B2 JPH0560268B2 (enExample) 1993-09-01

Family

ID=11730160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59009796A Granted JPS60154574A (ja) 1984-01-23 1984-01-23 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60154574A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155677A (ja) * 1986-12-19 1988-06-28 Agency Of Ind Science & Technol 触覚センサと基板の接続方法
JP2019060855A (ja) * 2017-09-05 2019-04-18 アイメック・ヴェーゼットウェーＩｍｅｃ Ｖｚｗ 半導体部品用の応力センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155677A (ja) * 1986-12-19 1988-06-28 Agency Of Ind Science & Technol 触覚センサと基板の接続方法
JP2019060855A (ja) * 2017-09-05 2019-04-18 アイメック・ヴェーゼットウェーＩｍｅｃ Ｖｚｗ 半導体部品用の応力センサ

Also Published As

Publication number Publication date
JPH0560268B2 (enExample) 1993-09-01

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