JPS60144542A - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPS60144542A
JPS60144542A JP68384A JP68384A JPS60144542A JP S60144542 A JPS60144542 A JP S60144542A JP 68384 A JP68384 A JP 68384A JP 68384 A JP68384 A JP 68384A JP S60144542 A JPS60144542 A JP S60144542A
Authority
JP
Japan
Prior art keywords
wall
movable
cover
wafer carrier
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP68384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH036429B2 (enrdf_load_stackoverflow
Inventor
Takehide Hayashi
武秀 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Daifuku Machinery Works Ltd
Original Assignee
Daifuku Co Ltd
Daifuku Machinery Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd, Daifuku Machinery Works Ltd filed Critical Daifuku Co Ltd
Priority to JP68384A priority Critical patent/JPS60144542A/ja
Publication of JPS60144542A publication Critical patent/JPS60144542A/ja
Publication of JPH036429B2 publication Critical patent/JPH036429B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP68384A 1984-01-05 1984-01-05 搬送装置 Granted JPS60144542A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP68384A JPS60144542A (ja) 1984-01-05 1984-01-05 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP68384A JPS60144542A (ja) 1984-01-05 1984-01-05 搬送装置

Publications (2)

Publication Number Publication Date
JPS60144542A true JPS60144542A (ja) 1985-07-30
JPH036429B2 JPH036429B2 (enrdf_load_stackoverflow) 1991-01-30

Family

ID=11480556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP68384A Granted JPS60144542A (ja) 1984-01-05 1984-01-05 搬送装置

Country Status (1)

Country Link
JP (1) JPS60144542A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987003356A1 (en) * 1985-11-26 1987-06-04 Shimizu Construction Co., Ltd. Clean room
JPS63203464A (ja) * 1987-02-18 1988-08-23 神鋼電機株式会社 荷搬送用自走台車
JPH0334346A (ja) * 1989-06-29 1991-02-14 Tokyo Electron Ltd デバイスキャリア包囲容器
JP2003092332A (ja) * 2001-09-18 2003-03-28 Tokyo Electron Ltd 無人搬送車
JP2006213216A (ja) * 2005-02-04 2006-08-17 Daifuku Co Ltd 搬送車

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033439A (ja) * 1983-08-02 1985-02-20 Nippon Muki Kk 搬送用クリ−ンユニツト並に搬送法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033439A (ja) * 1983-08-02 1985-02-20 Nippon Muki Kk 搬送用クリ−ンユニツト並に搬送法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987003356A1 (en) * 1985-11-26 1987-06-04 Shimizu Construction Co., Ltd. Clean room
JPS63203464A (ja) * 1987-02-18 1988-08-23 神鋼電機株式会社 荷搬送用自走台車
JPH0334346A (ja) * 1989-06-29 1991-02-14 Tokyo Electron Ltd デバイスキャリア包囲容器
JP2003092332A (ja) * 2001-09-18 2003-03-28 Tokyo Electron Ltd 無人搬送車
JP2006213216A (ja) * 2005-02-04 2006-08-17 Daifuku Co Ltd 搬送車

Also Published As

Publication number Publication date
JPH036429B2 (enrdf_load_stackoverflow) 1991-01-30

Similar Documents

Publication Publication Date Title
TW546232B (en) Loading and unloading goods apparatus
WO2019146278A1 (ja) 搬送車
TW200825003A (en) Method and apparatus for transporting, queuing, and loading of large area substrates in multi-tool processing operations
JPS60144542A (ja) 搬送装置
JP3528589B2 (ja) 搬送車
JP2853888B2 (ja) 調剤システムにおけるサブストッカー
CN103650126A (zh) 方向调整装置以及方向调整方法
JPS6097113A (ja) 移載用横動コンベヤ付き搬送台車
CN111634854B (zh) 移载机
JPS60144999A (ja) 搬送装置
JPS60140035A (ja) クリ−ンル−ム内の荷搬送設備
JPH0699028B2 (ja) 面材配設装置
JPH09108055A (ja) 収納棚における収納物落下防止装置
JPH05178413A (ja) ストッカ
JP2007297165A (ja) 保管設備
JPS63185704A (ja) 搬送用ハンドリング装置
JP4829553B2 (ja) 無人搬送車
JP2009234721A (ja) 貸金庫装置における収納箱用のターンコンベヤ装置と、それを使用する収納箱の搬送システム
JP3663672B2 (ja) 板状材のストッカー装置
JPH06183513A (ja) 荷保管設備
JPH055722B2 (enrdf_load_stackoverflow)
JPS6279125A (ja) 搬送装置
JPH0637231U (ja) ホイール反転移載装置
JPH05338743A (ja) 移載装置を有する入出庫口装置
JPS582120A (ja) 物品の方向変換装置