JPS60144542A - Carrying device - Google Patents

Abstract

PURPOSE:To prevent duct pollution during carrying, by so constituting the titled device that a carrying path is enclosed with a cover and a filtered air flow is fed and the intrusion of the open air is prevented, in the carrying device of a water for a transistor. CONSTITUTION:A wafer carrier 45 is carried above the supporting part 4 of the article to be carried, the movable enclosing wall 7 of a cover 5 is moved by an opening and closing device 30 until the wall 7 is abutted against a stationary wall 6 and the carrier 45 is covered. Then a fan 9 is worked, clean air is sent into a space 11 formed by the movable enclosing wall 7 and the stationary wall 6 through a filter 8, a clean air flow is made to generate around the wafer carrier 45 and then outdoor polluted air is prevented from invading. With this construction, dust pollution of the article to be carried can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is useful for transporting objects that would otherwise be contaminated by dust in the air during transport, such as wafers (Si plates) used in the manufacturing process of transistors. The purpose of the present invention is to provide a conveying device suitable for

Hereinafter, one embodiment of the present invention will be explained based on the attached illustrative drawings. In Figs. It is self-propelled by automatic running control such as an acoustic electromagnetic induction system or a photoelectric induction system, and is equipped with steering/driving wheels 2 and free wheels 3, which are driven by an onboard battery and are automatically steered. Reference numeral 4 denotes an object support section numbered at the upper center of the transport vehicle 1, and numeral 5 represents a cover that surrounds the object support section 4 in an openable and closable manner. This cover 5 is attached to the conveyed object support section 4.
A fixed wall 6 erected behind the fixed wall 6, and a movable surrounding wall 7 which is movable in front of the fixed wall 6 in the direction of distance (in the moving direction of the conveyance vehicle) with respect to the fixed wall 6 and is open only in the six fixed walls. When the movable surrounding wall 7 moves toward the fixed wall 6 and the outer edge of the open part of the movable surrounding wall 7 comes into contact with the peripheral edge of the fixed wall 69, the space above the conveyed object support section 4 becomes almost sealed. covered by.

As shown in FIG. 3, the movable surrounding wall 7 of the cover 5 has a double structure in which a front vertical wall 7a and an upper horizontal wall 7b, which face the fixed wall 6, communicate with each other, and the upper horizontal The lower wall plate of the wall portion 7b is composed of a removable and replaceable plate filter 8, and the front vertical wall portion 7a has air sucked in from an air intake port 9a that opens to the outside. A fan 9 is provided for feeding air from the plate filter 8 into the space 11 within the movable surrounding wall 7 via the L-shaped space 10 within the movable surrounding wall 7b. The plate filter 8
As such, a so-called HEPA filter used in clean rooms of VLSI factories, precision machinery factories, etc. is suitable. Reference numeral 30 denotes an opening/closing means for moving the movable surrounding wall 7 back and forth, which includes a screw shaft 62 driven by the motor 31 in any forward or reverse direction, and a screw shaft 62 that is screwed onto the screw shaft 62 and is attached to the bottom of the movable wall 7. It is composed of a female threaded body 152s.

As shown in FIGS. 3 and 4, the transported object support section 4
is provided with a pair of bars 12a and 12b for holding objects to be transported, which are opposed to each other in the moving direction of the transport vehicle. The clamping bars 12a and 12b are support members 14a that vertically pass through slits 13a and 16b formed in the floor plate 4a of the conveyed object support section 4.

One end is supported in a cantilevered manner by 14b. The support members 14a and 14b are driven by a drive device 15 provided below the floorboard 4a. The drive device 15 includes a movable base 16 movable in the front and rear horizontal directions (fill vehicle moving direction), a front and rear position adjustment means 17 for the movable base 16, and a movable base 16 that is supported on the movable base 16 so as to be movable up and down. Lifting table 18, height adjustment means 19 for this lifting table 18, tilting table 21 whose rear end is supported by a horizontal horizontal support shaft 20 on the lifting table 18 and capable of vertically tilting, this tilting table 2
1 tilting means 22, a lateral movement table 24 supported on the tilt table 21 so as to be laterally movable in the left and right directions via a slide guide rod 2B, a lateral position adjustment means 25 for laterally moving the lateral movement table 24, A pair of front and rear drive stands 28a, 28 are supported on the transverse movement stand 24 so as to be movable in the front and back direction via a slide guide rod 26 and screw shafts 27a, 27b, respectively.
b, and a drive means 29 for moving these two drive stands 28a, 28b toward and away from each other, and the pair of support members 14a, 14b are connected to the pair of drive stands 28a.
, 28b.

The longitudinal position adjusting means 17 of the movable base 16 includes a rack gear 34 connected to the movable base 16, and a pinion gear that meshes with the 7-gear gear 34 and is driven by a motor 35 in any forward or reverse direction. It is composed of 36.

The height adjusting means 19 of the lifting platform 18
The rack gear 67 and this rank gear 37 are connected to each other.
It is composed of a pinion gear that engages with the movable base 16 and is pivotally supported on the movable base 16 side, and a motor 68 that drives the pinion gear in any direction in the forward or reverse direction. The tilt stand 21
The tilting means 22 includes an eccentric cam 39 that supports the free end of the tilt table 21 and has a shaft *'sQ on the lifting table 18, and a motor 40 that drives the eccentric cam 259 in the forward and reverse directions.
It is composed of □.

A screw shaft 42 supported on the screw base 21 and driven by a motor 41 in any forward or reverse direction;
It is composed of. The drive means 29 of the drive bases 28a, 28b consists of screw shafts 27a, 27b into which the drive bases 28a, 28b are screwed and whose helical directions are opposite to each other, and screw shafts 27a, 27b which can be rotated in any forward or reverse direction. It is composed of a motor 44 that is driven by a motor.

To explain how to use it, the transport vehicle 1 is stopped at the object receiving position, and the movable surrounding wall 7 of the cover 5 is opened and closed by the 5 opening/closing means. The screw shaft 52 of No. 10 is rotated by the motor 51 and moved to the opening movement limit position as shown in FIG. 3, thereby opening the conveyed object support section 4. Then, by rotating the screw shaft 42 by the motor 41 of the left-right position adjustment means 25 and moving the lateral movement table 24 from the backward limit position shown in FIG. 4 in the lateral direction,
A pair of clamping bars 12a, 12b are connected to supporting members 14a, 1
4b and drive platforms 28a and 28b, the transport vehicle 1 is moved so as to protrude from the carrier 1 in the lateral direction. This pair of clamping bars 122,1
Due to the protruding movement of 2b, the object to be transported, for example, the wafer carrier 4 placed at a predetermined position on the side of the conveyor vehicle stop position is
The pair of clamping bars 12a and 12b are located on both sides of the bar 5. Thereafter, the screw shafts 27a, 27b are rotated by the motor 44 of the drive stand driving means 29, and the pair of clamping bars 12a are rotated together with both drive stands 28a, 28b.

By moving the holding bars 12b closer to each other, the wafer carrier 45 located in the middle is moved between the holding bars 12a and 12b.
Clamp it with 12b.

Next, the motor 58 of the height adjusting means 19 rotates the pinion gear that engages the rack gear 37 to raise the lifting table 18 by a predetermined amount.
, 12b is lifted by a predetermined amount together with the elevating table 18, the tilting table 21, and the transverse movement table 24. Then, the screw shaft 42 is reversely rotated by the motor 41 of the left-right position adjusting means 25 to move the lateral movement table 24 backward to the backward limit position shown in FIG. is pulled onto the conveyed object support section 4, and the eccentric cam 39 is rotated by a predetermined angle by the motor 40 of the tilting means 22 to extend the tilt table 21 upward around the support shaft 26. The wafer carrier 45 held between the bars 12a and 12b is tilted forward and upward together with the horizontal movement table 24 as shown in FIG. At this time, the wafer carrier 45 is supported in such a way that the openings 46a of the wafer support shelves 46 formed in multiple stages open toward the forward direction of the transport vehicle 1, so that the wafer carrier 45 is moved forward as described above. When the wafer support shelf 46 is tilted upward, the wafer support shelf 46 is tilted to be as high as the loading/unloading port 46 a (! It can be prevented from jumping out from the insertion/extraction opening 462.

Once the wafer carrier 45 is loaded onto the object support section 4 as described above, the opening/closing means! By rotating the screw shaft 52 by the motor 31 of 10 and moving the movable surrounding wall 7 of the cover 5 to a position where it abuts the fixed wall 6 as shown in FIG. The wafer carrier 45 is surrounded by a movable surrounding wall 7 and a fixed wall 6, and is isolated from the outside world. Then, by operating the fan 9 and sending the outside air, which has been purified by the filter 8, into the space 11 surrounded by the movable wall 7 and the fixed wall 6, a clean air flow is generated in the space surrounding the wafer carrier 45. This can prevent air containing dust from the outside world from entering the space 11 and contaminating the wafer carrier 45 and the wafers stored therein.

It should be noted that the clean air sent into the space 11 flows through gaps and slits 13a that occur between the movable wall 7 and the fixed wall 6, etc.
Although the air flows out to the outside world through 13b, an air outlet may be provided at an appropriate position. Furthermore, while the transport vehicle 1 is running, the wafer carrier 45 is held in the air by the pair of clamping bars 12a and 12b as shown in FIG. If there is a risk that the wafer carrier 45 may slip, the wafer carrier 45 may be provided with protrusions that rest on the holding bars 12a, 12b, or the holding bars 12a, 12b may be fitted into recesses formed in the wafer carrier 45. It can be configured as follows.

The wafer carrier 45 supported in the clean area on the object support section 4 as described above is transported to a predetermined position by the automatic traveling of the transport vehicle 1. The work of carrying out the work to the receiving stand etc. installed on the side of the stop position can be performed by the reverse procedure of the above-mentioned carry-in work. At this time, if there is an error in the stopping position of the transport vehicle 1, the motor 35 of the longitudinal position adjustment means 17 rotates the pinion gear 256 to move the movable base 16 in the longitudinal direction, so that the pair of clamping bars 12a, Wafer carrier 4 held by 12b
5 can be adjusted in position in the front-back direction together with the lifting table 18, the tilting table 21, and the transverse movement table 24.

As in the above embodiment, the conveying device of the present invention is provided with a cover that surrounds the conveyed object support part in an openable and closable manner, and includes a fan that generates an air flow passing through the space surrounded by the cover, and a fan that generates an air flow that passes through the space surrounded by the cover. Since it is equipped with a filter that cleans the incoming air, it not only covers the transported object supported on the transported object supporting section, but also
Air purified by a filter is circulated through the cover to completely prevent outside air containing dust from entering the cover, and the transported objects are protected within the clean area. obtain. Therefore, as shown in the embodiments, it can be used extremely effectively as a means for transporting objects that must be protected from being contaminated by dust in the air during transport.

[Brief explanation of the drawing]

Fig. 1 is a side view, Fig. 2 is a plan view, Fig. 3 is a longitudinal side view of the main part, Fig. 4 is a longitudinal cross-sectional rear view of the main part, and Fig. 5 is the main part in the conveyed state of the transported object. FIG. 1... Automatic guided vehicle, 4... Transported object support section, 5...
- Cover that can be opened and closed, 6... Fixed wall, 7... Movable surrounding wall, 8... Plate filter, 9... Fan, 10.
... Air flow space, 11 ... Space within the movable surrounding wall, 12
a, 12b...a pair of clamping pars, 14a, 14b-
Support member, 15... Drive means, 16... Movable base,
17... Fore-and-aft position adjustment means, 18... Lifting platform, 19
... Height adjustment means, 20 ... Support shaft, 21 ... Tilt stand, 22 ... Tilting means, 2i5, 26 ... Slide' guide rod °, 24 ... Lateral movement table, 25 ...Left and right position adjustment means, 27a, 271b, i52. 42--screw shaft, 28a, 28b-drive stand, 29...drive stand drive means, 60...cover opening/closing means, 31. i55, 38, 40, 41.44...Motor, 53,4i5...Female screw body, 34.37...
- Rack gear, 36... Pinion gear, 39... Eccentric cam, 45... Wafer carrier (transferred object), 46
...Wafer support shelf, 46a...Intake/unloading port. 2. Voluntary procedure (method) 1. Display of the case 1982 Patent Application No. 000683 2, Name of the invention Conveying device 3, Person making the amendment Relationship to the case Patent applicant address 3-2-11 Mitejima, Nishiyodogawa-ku, Osaka-shi, Osaka Name (364) Daifuku Kikou Co., Ltd. Showa Month, Day 5, Subject of amendment (11 Full text of specification 6, Contents of amendment The entire specification is reprinted using 12p font size as shown in the attached sheet (no change in content).

Claims (1)

[Claims] A cover is provided that surrounds the conveyed object support part in an openable and closable manner, and a fan that generates an air flow through the space surrounded by the cover and a filter that purifies the air flowing into the space are provided. A conveying device consisting of