JPS60138434A - 半導体形静電容量式圧力センサの製造方法 - Google Patents

半導体形静電容量式圧力センサの製造方法

Info

Publication number
JPS60138434A
JPS60138434A JP24478383A JP24478383A JPS60138434A JP S60138434 A JPS60138434 A JP S60138434A JP 24478383 A JP24478383 A JP 24478383A JP 24478383 A JP24478383 A JP 24478383A JP S60138434 A JPS60138434 A JP S60138434A
Authority
JP
Japan
Prior art keywords
layer
low resistance
insulating layer
epitaxial
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24478383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0380254B2 (enrdf_load_stackoverflow
Inventor
Kimihiro Nakamura
公弘 中村
Mitsuru Tamai
満 玉井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP24478383A priority Critical patent/JPS60138434A/ja
Priority to DE19843445774 priority patent/DE3445774A1/de
Publication of JPS60138434A publication Critical patent/JPS60138434A/ja
Publication of JPH0380254B2 publication Critical patent/JPH0380254B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP24478383A 1983-12-27 1983-12-27 半導体形静電容量式圧力センサの製造方法 Granted JPS60138434A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP24478383A JPS60138434A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサの製造方法
DE19843445774 DE3445774A1 (de) 1983-12-27 1984-12-12 Verfahren zur herstellung eines kapazitiven halbleiterdruckaufnehmers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24478383A JPS60138434A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサの製造方法

Publications (2)

Publication Number Publication Date
JPS60138434A true JPS60138434A (ja) 1985-07-23
JPH0380254B2 JPH0380254B2 (enrdf_load_stackoverflow) 1991-12-24

Family

ID=17123853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24478383A Granted JPS60138434A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサの製造方法

Country Status (2)

Country Link
JP (1) JPS60138434A (enrdf_load_stackoverflow)
DE (1) DE3445774A1 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6263828A (ja) * 1985-09-06 1987-03-20 Yokogawa Electric Corp 振動式トランスジューサ
JPS6430423U (enrdf_load_stackoverflow) * 1987-08-17 1989-02-23
US6941812B2 (en) 2002-08-20 2005-09-13 Nagano Keiki Co., Ltd. Converter and method of manufacturing the same
WO2009001488A1 (ja) * 2007-06-22 2008-12-31 Panasonic Corporation ダイアフラム構造及び音響センサ
US8166827B2 (en) 2008-09-10 2012-05-01 Panasonic Corporation MEMS device and method for manufacturing the same

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
DE4106933B4 (de) * 1991-03-05 2004-12-16 Robert Bosch Gmbh Strukturierungsverfahren
DE4441903C1 (de) * 1994-11-24 1996-03-21 Siemens Ag Drucksensor
EP0714017B1 (de) * 1994-11-24 2000-07-12 Siemens Aktiengesellschaft Kapazitiver Drucksensor
EP0758080B1 (de) * 1995-08-09 1998-09-30 Siemens Aktiengesellschaft Mikromechanisches Bauelement mit perforierter, spannungsfreier Membran
US5888845A (en) * 1996-05-02 1999-03-30 National Semiconductor Corporation Method of making high sensitivity micro-machined pressure sensors and acoustic transducers
EP0979992B1 (de) * 1998-08-11 2003-10-08 Infineon Technologies AG Verfahren zur Herstellung eines Mikromechanischen Sensors

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
JPS5764978A (en) * 1980-10-03 1982-04-20 Ibm Capacitive pressure transducer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2856708A1 (de) * 1978-12-29 1980-07-10 Siemens Ag Messanordnung fuer einen druck-messumformer
US4261086A (en) * 1979-09-04 1981-04-14 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
DE2940955A1 (de) * 1979-10-09 1981-04-23 Gosudarstvennyj naučno-issledovatel'skij institut teploenergetičeskogo priborostroenija, Moskva Halbleiter-dehnungswandler

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
JPS5764978A (en) * 1980-10-03 1982-04-20 Ibm Capacitive pressure transducer

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6263828A (ja) * 1985-09-06 1987-03-20 Yokogawa Electric Corp 振動式トランスジューサ
JPS6430423U (enrdf_load_stackoverflow) * 1987-08-17 1989-02-23
US6941812B2 (en) 2002-08-20 2005-09-13 Nagano Keiki Co., Ltd. Converter and method of manufacturing the same
WO2009001488A1 (ja) * 2007-06-22 2008-12-31 Panasonic Corporation ダイアフラム構造及び音響センサ
JP2009033698A (ja) * 2007-06-22 2009-02-12 Panasonic Corp ダイアフラム構造及び音響センサ
US8146437B2 (en) 2007-06-22 2012-04-03 Panasonic Corporation Diaphragm structure and MEMS device
US8166827B2 (en) 2008-09-10 2012-05-01 Panasonic Corporation MEMS device and method for manufacturing the same

Also Published As

Publication number Publication date
JPH0380254B2 (enrdf_load_stackoverflow) 1991-12-24
DE3445774A1 (de) 1985-07-04

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