JPH0380254B2 - - Google Patents

Info

Publication number
JPH0380254B2
JPH0380254B2 JP58244783A JP24478383A JPH0380254B2 JP H0380254 B2 JPH0380254 B2 JP H0380254B2 JP 58244783 A JP58244783 A JP 58244783A JP 24478383 A JP24478383 A JP 24478383A JP H0380254 B2 JPH0380254 B2 JP H0380254B2
Authority
JP
Japan
Prior art keywords
layer
forming
low resistance
insulating layer
epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58244783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60138434A (ja
Inventor
Kimihiro Nakamura
Mitsuru Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP24478383A priority Critical patent/JPS60138434A/ja
Priority to DE19843445774 priority patent/DE3445774A1/de
Publication of JPS60138434A publication Critical patent/JPS60138434A/ja
Publication of JPH0380254B2 publication Critical patent/JPH0380254B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP24478383A 1983-12-27 1983-12-27 半導体形静電容量式圧力センサの製造方法 Granted JPS60138434A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP24478383A JPS60138434A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサの製造方法
DE19843445774 DE3445774A1 (de) 1983-12-27 1984-12-12 Verfahren zur herstellung eines kapazitiven halbleiterdruckaufnehmers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24478383A JPS60138434A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサの製造方法

Publications (2)

Publication Number Publication Date
JPS60138434A JPS60138434A (ja) 1985-07-23
JPH0380254B2 true JPH0380254B2 (enrdf_load_stackoverflow) 1991-12-24

Family

ID=17123853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24478383A Granted JPS60138434A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサの製造方法

Country Status (2)

Country Link
JP (1) JPS60138434A (enrdf_load_stackoverflow)
DE (1) DE3445774A1 (enrdf_load_stackoverflow)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6263828A (ja) * 1985-09-06 1987-03-20 Yokogawa Electric Corp 振動式トランスジューサ
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
JPH064304Y2 (ja) * 1987-08-17 1994-02-02 横河電機株式会社 静電容量形半導体圧力センサ
DE4106933B4 (de) * 1991-03-05 2004-12-16 Robert Bosch Gmbh Strukturierungsverfahren
DE4441903C1 (de) * 1994-11-24 1996-03-21 Siemens Ag Drucksensor
EP0714017B1 (de) * 1994-11-24 2000-07-12 Siemens Aktiengesellschaft Kapazitiver Drucksensor
EP0758080B1 (de) * 1995-08-09 1998-09-30 Siemens Aktiengesellschaft Mikromechanisches Bauelement mit perforierter, spannungsfreier Membran
US5888845A (en) * 1996-05-02 1999-03-30 National Semiconductor Corporation Method of making high sensitivity micro-machined pressure sensors and acoustic transducers
EP0979992B1 (de) * 1998-08-11 2003-10-08 Infineon Technologies AG Verfahren zur Herstellung eines Mikromechanischen Sensors
JP4250387B2 (ja) 2002-08-20 2009-04-08 長野計器株式会社 変換器およびその製造方法
JP2009033698A (ja) 2007-06-22 2009-02-12 Panasonic Corp ダイアフラム構造及び音響センサ
CN102143906A (zh) 2008-09-10 2011-08-03 松下电器产业株式会社 微机电系统器件及其制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
DE2856708A1 (de) * 1978-12-29 1980-07-10 Siemens Ag Messanordnung fuer einen druck-messumformer
US4261086A (en) * 1979-09-04 1981-04-14 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
DE2940955A1 (de) * 1979-10-09 1981-04-23 Gosudarstvennyj naučno-issledovatel'skij institut teploenergetičeskogo priborostroenija, Moskva Halbleiter-dehnungswandler
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer

Also Published As

Publication number Publication date
DE3445774A1 (de) 1985-07-04
JPS60138434A (ja) 1985-07-23

Similar Documents

Publication Publication Date Title
JP3506932B2 (ja) 半導体圧力センサ及びその製造方法
JP2811768B2 (ja) 半導体式加速度センサおよびその製造方法
JPH0380254B2 (enrdf_load_stackoverflow)
JPH05304303A (ja) 加速度センサ及びその製造方法
WO2007058010A1 (ja) 半導体圧力センサおよびその製造方法
KR950000319B1 (ko) 반도체 압력센서 및 그 제조방법
JPH0481868B2 (enrdf_load_stackoverflow)
JP2803321B2 (ja) 半導体感歪センサ
JPH06302834A (ja) 薄膜構造の製造方法
JPH01136378A (ja) 圧力変換装置の製造方法
JP2006003102A (ja) 半導体圧力センサーおよびその製造方法
JP2876617B2 (ja) 半導体圧力センサ及びその製造方法
JPH06221945A (ja) 半導体圧力センサおよびその製造方法
US7319581B2 (en) Capacitive pressure sensor
JPH0230188A (ja) 半導体圧力センサの製造方法
JP2000138381A (ja) 密閉容器及びその製造方法
JPS6267880A (ja) 半導体装置の製造方法
JPH1140820A (ja) 半導体力学量センサの製造方法
JPH06163941A (ja) 半導体圧力センサ
JPH0868710A (ja) 静電容量型圧力センサとその製造方法
JP4783914B2 (ja) 半導体力学量センサおよび半導体力学量センサの製造方法
JP2501722B2 (ja) 半導体形静電容量式圧力センサ
JPH04329676A (ja) 半導体加速度センサの製造方法
JP3580285B2 (ja) 半導体力学量センサの製造方法
JP3055508B2 (ja) 圧力検出器の製造方法