JPS60136137U - 減圧ｃｖｄ装置 - Google Patents

減圧ｃｖｄ装置

Info

Publication number
JPS60136137U
JPS60136137U JP2301284U JP2301284U JPS60136137U JP S60136137 U JPS60136137 U JP S60136137U JP 2301284 U JP2301284 U JP 2301284U JP 2301284 U JP2301284 U JP 2301284U JP S60136137 U JPS60136137 U JP S60136137U
Authority
JP
Japan
Prior art keywords
pressure cvd
low pressure
cvd equipment
quartz
cvd apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2301284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0126105Y2 (enrdf_load_stackoverflow
Inventor
矢内　鉄朗
栗原　啓行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP2301284U priority Critical patent/JPS60136137U/ja
Publication of JPS60136137U publication Critical patent/JPS60136137U/ja
Application granted granted Critical
Publication of JPH0126105Y2 publication Critical patent/JPH0126105Y2/ja
Granted legal-status Critical Current

Links

JP2301284U 1984-02-22 1984-02-22 減圧ｃｖｄ装置 Granted JPS60136137U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2301284U JPS60136137U (ja) 1984-02-22 1984-02-22 減圧ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2301284U JPS60136137U (ja) 1984-02-22 1984-02-22 減圧ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS60136137U true JPS60136137U (ja) 1985-09-10
JPH0126105Y2 JPH0126105Y2 (enrdf_load_stackoverflow) 1989-08-04

Family

ID=30515850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2301284U Granted JPS60136137U (ja) 1984-02-22 1984-02-22 減圧ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS60136137U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472970A (en) * 1977-11-24 1979-06-11 Hitachi Ltd Vapor-phase reaction oven

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472970A (en) * 1977-11-24 1979-06-11 Hitachi Ltd Vapor-phase reaction oven

Also Published As

Publication number Publication date
JPH0126105Y2 (enrdf_load_stackoverflow) 1989-08-04

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