JPS6012778B2 - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6012778B2
JPS6012778B2 JP48128253A JP12825373A JPS6012778B2 JP S6012778 B2 JPS6012778 B2 JP S6012778B2 JP 48128253 A JP48128253 A JP 48128253A JP 12825373 A JP12825373 A JP 12825373A JP S6012778 B2 JPS6012778 B2 JP S6012778B2
Authority
JP
Japan
Prior art keywords
contact hole
wiring
layer
aluminum
polysilicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48128253A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5081079A (enrdf_load_stackoverflow
Inventor
辰美 白須
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP48128253A priority Critical patent/JPS6012778B2/ja
Publication of JPS5081079A publication Critical patent/JPS5081079A/ja
Publication of JPS6012778B2 publication Critical patent/JPS6012778B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP48128253A 1973-11-16 1973-11-16 半導体装置の製造方法 Expired JPS6012778B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48128253A JPS6012778B2 (ja) 1973-11-16 1973-11-16 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48128253A JPS6012778B2 (ja) 1973-11-16 1973-11-16 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5081079A JPS5081079A (enrdf_load_stackoverflow) 1975-07-01
JPS6012778B2 true JPS6012778B2 (ja) 1985-04-03

Family

ID=14980269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48128253A Expired JPS6012778B2 (ja) 1973-11-16 1973-11-16 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6012778B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421290A (en) * 1977-07-19 1979-02-17 Mitsubishi Electric Corp Integrated circuit device and its manufacture

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5148757B2 (enrdf_load_stackoverflow) * 1971-10-05 1976-12-22
JPS4924171U (enrdf_load_stackoverflow) * 1972-05-31 1974-03-01

Also Published As

Publication number Publication date
JPS5081079A (enrdf_load_stackoverflow) 1975-07-01

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