JPS60115255A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS60115255A
JPS60115255A JP58222041A JP22204183A JPS60115255A JP S60115255 A JPS60115255 A JP S60115255A JP 58222041 A JP58222041 A JP 58222041A JP 22204183 A JP22204183 A JP 22204183A JP S60115255 A JPS60115255 A JP S60115255A
Authority
JP
Japan
Prior art keywords
silicon
resistor
etching
film
nitride film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58222041A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0558263B2 (OSRAM
Inventor
Kazuo Nakazato
和郎 中里
Toru Nakamura
徹 中村
Yoshifumi Kawamoto
川本　佳史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58222041A priority Critical patent/JPS60115255A/ja
Publication of JPS60115255A publication Critical patent/JPS60115255A/ja
Publication of JPH0558263B2 publication Critical patent/JPH0558263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
JP58222041A 1983-11-28 1983-11-28 半導体装置の製造方法 Granted JPS60115255A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58222041A JPS60115255A (ja) 1983-11-28 1983-11-28 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58222041A JPS60115255A (ja) 1983-11-28 1983-11-28 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60115255A true JPS60115255A (ja) 1985-06-21
JPH0558263B2 JPH0558263B2 (OSRAM) 1993-08-26

Family

ID=16776155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58222041A Granted JPS60115255A (ja) 1983-11-28 1983-11-28 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60115255A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6284545A (ja) * 1985-10-07 1987-04-18 Nec Corp 半導体装置
US8953986B2 (en) 2010-04-27 2015-02-10 Ricoh Company, Limited Powder container, powder conveying apparatus, and image forming apparatus
US9665040B2 (en) 2011-07-14 2017-05-30 Canon Kabushiki Kaisha Developer accommodating unit, process cartridge and electrophotographic image forming apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6284545A (ja) * 1985-10-07 1987-04-18 Nec Corp 半導体装置
US8953986B2 (en) 2010-04-27 2015-02-10 Ricoh Company, Limited Powder container, powder conveying apparatus, and image forming apparatus
US9665040B2 (en) 2011-07-14 2017-05-30 Canon Kabushiki Kaisha Developer accommodating unit, process cartridge and electrophotographic image forming apparatus
US9885978B2 (en) 2011-07-14 2018-02-06 Canon Kabushiki Kaisha Developer accommodating unit, process cartridge and electrophotographic image forming apparatus
US10175609B2 (en) 2011-07-14 2019-01-08 Canon Kabushiki Kaisha Developer accommodating unit, process cartridge and electrophotographic image forming apparatus
US10620567B2 (en) 2011-07-14 2020-04-14 Canon Kabushiki Kaisha Developer accommodating unit, process cartridge and electrophotographic image forming apparatus

Also Published As

Publication number Publication date
JPH0558263B2 (OSRAM) 1993-08-26

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