JPH0558263B2 - - Google Patents

Info

Publication number
JPH0558263B2
JPH0558263B2 JP58222041A JP22204183A JPH0558263B2 JP H0558263 B2 JPH0558263 B2 JP H0558263B2 JP 58222041 A JP58222041 A JP 58222041A JP 22204183 A JP22204183 A JP 22204183A JP H0558263 B2 JPH0558263 B2 JP H0558263B2
Authority
JP
Japan
Prior art keywords
film
etching
silicon
polycrystalline silicon
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58222041A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60115255A (ja
Inventor
Kazuo Nakazato
Tooru Nakamura
Yoshifumi Kawamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58222041A priority Critical patent/JPS60115255A/ja
Publication of JPS60115255A publication Critical patent/JPS60115255A/ja
Publication of JPH0558263B2 publication Critical patent/JPH0558263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
JP58222041A 1983-11-28 1983-11-28 半導体装置の製造方法 Granted JPS60115255A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58222041A JPS60115255A (ja) 1983-11-28 1983-11-28 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58222041A JPS60115255A (ja) 1983-11-28 1983-11-28 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60115255A JPS60115255A (ja) 1985-06-21
JPH0558263B2 true JPH0558263B2 (OSRAM) 1993-08-26

Family

ID=16776155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58222041A Granted JPS60115255A (ja) 1983-11-28 1983-11-28 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60115255A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0620110B2 (ja) * 1985-10-07 1994-03-16 日本電気株式会社 半導体装置
CN102947762B (zh) 2010-04-27 2016-06-08 株式会社理光 粉体收纳容器、粉体输送装置及图像形成装置
JP5420025B2 (ja) 2011-07-14 2014-02-19 キヤノン株式会社 現像剤収納ユニット、プロセスカートリッジ、電子写真画像形成装置

Also Published As

Publication number Publication date
JPS60115255A (ja) 1985-06-21

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