JPS60112672A - 窒化珪素の製造方法 - Google Patents

窒化珪素の製造方法

Info

Publication number
JPS60112672A
JPS60112672A JP21625883A JP21625883A JPS60112672A JP S60112672 A JPS60112672 A JP S60112672A JP 21625883 A JP21625883 A JP 21625883A JP 21625883 A JP21625883 A JP 21625883A JP S60112672 A JPS60112672 A JP S60112672A
Authority
JP
Japan
Prior art keywords
powder
nitriding
oxygen
silicon
silicon nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21625883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6230126B2 (enExample
Inventor
肇 加藤
三和　幸彦
津々見　毅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiheiyo Cement Corp
Original Assignee
Onoda Cement Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Onoda Cement Co Ltd filed Critical Onoda Cement Co Ltd
Priority to JP21625883A priority Critical patent/JPS60112672A/ja
Publication of JPS60112672A publication Critical patent/JPS60112672A/ja
Publication of JPS6230126B2 publication Critical patent/JPS6230126B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
JP21625883A 1983-11-18 1983-11-18 窒化珪素の製造方法 Granted JPS60112672A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21625883A JPS60112672A (ja) 1983-11-18 1983-11-18 窒化珪素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21625883A JPS60112672A (ja) 1983-11-18 1983-11-18 窒化珪素の製造方法

Publications (2)

Publication Number Publication Date
JPS60112672A true JPS60112672A (ja) 1985-06-19
JPS6230126B2 JPS6230126B2 (enExample) 1987-06-30

Family

ID=16685731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21625883A Granted JPS60112672A (ja) 1983-11-18 1983-11-18 窒化珪素の製造方法

Country Status (1)

Country Link
JP (1) JPS60112672A (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5148799A (ja) * 1974-10-24 1976-04-27 Toyoda Chuo Kenkyusho Kk Chitsukakeisofunmatsuno seizohoho
JPS5450882A (en) * 1977-09-29 1979-04-21 Tokyo Shibaura Electric Co Vacuum circuit breaker
JPS5550882A (en) * 1978-10-06 1980-04-14 Yaskawa Electric Mfg Co Ltd Screen-removing device in automatic dried-laver manufacturing machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5148799A (ja) * 1974-10-24 1976-04-27 Toyoda Chuo Kenkyusho Kk Chitsukakeisofunmatsuno seizohoho
JPS5450882A (en) * 1977-09-29 1979-04-21 Tokyo Shibaura Electric Co Vacuum circuit breaker
JPS5550882A (en) * 1978-10-06 1980-04-14 Yaskawa Electric Mfg Co Ltd Screen-removing device in automatic dried-laver manufacturing machine

Also Published As

Publication number Publication date
JPS6230126B2 (enExample) 1987-06-30

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