JPS6010784A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6010784A
JPS6010784A JP58119073A JP11907383A JPS6010784A JP S6010784 A JPS6010784 A JP S6010784A JP 58119073 A JP58119073 A JP 58119073A JP 11907383 A JP11907383 A JP 11907383A JP S6010784 A JPS6010784 A JP S6010784A
Authority
JP
Japan
Prior art keywords
layer
etched
gate
wall
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58119073A
Other languages
English (en)
Japanese (ja)
Other versions
JPH058590B2 (enExample
Inventor
Kenichi Imamura
健一 今村
Naoki Yokoyama
直樹 横山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58119073A priority Critical patent/JPS6010784A/ja
Publication of JPS6010784A publication Critical patent/JPS6010784A/ja
Publication of JPH058590B2 publication Critical patent/JPH058590B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP58119073A 1983-06-30 1983-06-30 半導体装置の製造方法 Granted JPS6010784A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58119073A JPS6010784A (ja) 1983-06-30 1983-06-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58119073A JPS6010784A (ja) 1983-06-30 1983-06-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6010784A true JPS6010784A (ja) 1985-01-19
JPH058590B2 JPH058590B2 (enExample) 1993-02-02

Family

ID=14752209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58119073A Granted JPS6010784A (ja) 1983-06-30 1983-06-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6010784A (enExample)

Also Published As

Publication number Publication date
JPH058590B2 (enExample) 1993-02-02

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