JPS6010744A - 半導体ウエ−ハ試験方法 - Google Patents
半導体ウエ−ハ試験方法Info
- Publication number
- JPS6010744A JPS6010744A JP11959883A JP11959883A JPS6010744A JP S6010744 A JPS6010744 A JP S6010744A JP 11959883 A JP11959883 A JP 11959883A JP 11959883 A JP11959883 A JP 11959883A JP S6010744 A JPS6010744 A JP S6010744A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- elements
- defective
- semiconductor
- boundary line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 31
- 238000012360 testing method Methods 0.000 title claims abstract description 4
- 230000002950 deficient Effects 0.000 claims abstract description 26
- 238000005259 measurement Methods 0.000 claims abstract description 20
- 238000004904 shortening Methods 0.000 claims description 3
- 230000007547 defect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 10
- 239000000523 sample Substances 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 23
- 239000000047 product Substances 0.000 description 12
- 238000000691 measurement method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11959883A JPS6010744A (ja) | 1983-06-30 | 1983-06-30 | 半導体ウエ−ハ試験方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11959883A JPS6010744A (ja) | 1983-06-30 | 1983-06-30 | 半導体ウエ−ハ試験方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6010744A true JPS6010744A (ja) | 1985-01-19 |
| JPS6321346B2 JPS6321346B2 (enrdf_load_stackoverflow) | 1988-05-06 |
Family
ID=14765349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11959883A Granted JPS6010744A (ja) | 1983-06-30 | 1983-06-30 | 半導体ウエ−ハ試験方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6010744A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6342137A (ja) * | 1986-08-07 | 1988-02-23 | Tokyo Electron Ltd | プロ−ブ装置 |
-
1983
- 1983-06-30 JP JP11959883A patent/JPS6010744A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6342137A (ja) * | 1986-08-07 | 1988-02-23 | Tokyo Electron Ltd | プロ−ブ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6321346B2 (enrdf_load_stackoverflow) | 1988-05-06 |
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