JPS60107247A - イオン打込装置のクライオポンプ再生装置 - Google Patents

イオン打込装置のクライオポンプ再生装置

Info

Publication number
JPS60107247A
JPS60107247A JP58214870A JP21487083A JPS60107247A JP S60107247 A JPS60107247 A JP S60107247A JP 58214870 A JP58214870 A JP 58214870A JP 21487083 A JP21487083 A JP 21487083A JP S60107247 A JPS60107247 A JP S60107247A
Authority
JP
Japan
Prior art keywords
cryopump
vacuum
rough
pressure
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58214870A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556616B2 (enrdf_load_stackoverflow
Inventor
Toshimichi Taya
田谷　俊陸
Katsunobu Abe
安部　勝信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58214870A priority Critical patent/JPS60107247A/ja
Publication of JPS60107247A publication Critical patent/JPS60107247A/ja
Publication of JPH0556616B2 publication Critical patent/JPH0556616B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP58214870A 1983-11-15 1983-11-15 イオン打込装置のクライオポンプ再生装置 Granted JPS60107247A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58214870A JPS60107247A (ja) 1983-11-15 1983-11-15 イオン打込装置のクライオポンプ再生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58214870A JPS60107247A (ja) 1983-11-15 1983-11-15 イオン打込装置のクライオポンプ再生装置

Publications (2)

Publication Number Publication Date
JPS60107247A true JPS60107247A (ja) 1985-06-12
JPH0556616B2 JPH0556616B2 (enrdf_load_stackoverflow) 1993-08-20

Family

ID=16662925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58214870A Granted JPS60107247A (ja) 1983-11-15 1983-11-15 イオン打込装置のクライオポンプ再生装置

Country Status (1)

Country Link
JP (1) JPS60107247A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007311815A (ja) * 2007-07-09 2007-11-29 Ulvac Kuraio Kk イオン注入方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007311815A (ja) * 2007-07-09 2007-11-29 Ulvac Kuraio Kk イオン注入方法

Also Published As

Publication number Publication date
JPH0556616B2 (enrdf_load_stackoverflow) 1993-08-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees