JPS5999732A - 電子装置の電位分布測定装置 - Google Patents
電子装置の電位分布測定装置Info
- Publication number
- JPS5999732A JPS5999732A JP57209673A JP20967382A JPS5999732A JP S5999732 A JPS5999732 A JP S5999732A JP 57209673 A JP57209673 A JP 57209673A JP 20967382 A JP20967382 A JP 20967382A JP S5999732 A JPS5999732 A JP S5999732A
- Authority
- JP
- Japan
- Prior art keywords
- data
- sample
- electronic device
- background data
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009826 distribution Methods 0.000 title claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 4
- 238000013500 data storage Methods 0.000 claims 4
- 238000005286 illumination Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 description 18
- 238000005259 measurement Methods 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 241000272525 Anas platyrhynchos Species 0.000 description 1
- 241000218645 Cedrus Species 0.000 description 1
- 206010028740 Nasal dryness Diseases 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57209673A JPS5999732A (ja) | 1982-11-30 | 1982-11-30 | 電子装置の電位分布測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57209673A JPS5999732A (ja) | 1982-11-30 | 1982-11-30 | 電子装置の電位分布測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5999732A true JPS5999732A (ja) | 1984-06-08 |
| JPH0363213B2 JPH0363213B2 (enrdf_load_stackoverflow) | 1991-09-30 |
Family
ID=16576708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57209673A Granted JPS5999732A (ja) | 1982-11-30 | 1982-11-30 | 電子装置の電位分布測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5999732A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011001635A1 (ja) * | 2009-06-30 | 2011-01-06 | 株式会社日立ハイテクノロジーズ | 半導体検査装置及びそれを用いた半導体検査方法 |
-
1982
- 1982-11-30 JP JP57209673A patent/JPS5999732A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011001635A1 (ja) * | 2009-06-30 | 2011-01-06 | 株式会社日立ハイテクノロジーズ | 半導体検査装置及びそれを用いた半導体検査方法 |
| JP5400882B2 (ja) * | 2009-06-30 | 2014-01-29 | 株式会社日立ハイテクノロジーズ | 半導体検査装置及びそれを用いた半導体検査方法 |
| US9123504B2 (en) | 2009-06-30 | 2015-09-01 | Hitachi High-Technologies Corporation | Semiconductor inspection device and semiconductor inspection method using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0363213B2 (enrdf_load_stackoverflow) | 1991-09-30 |
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