JPS5999732A - 電子装置の電位分布測定装置 - Google Patents

電子装置の電位分布測定装置

Info

Publication number
JPS5999732A
JPS5999732A JP57209673A JP20967382A JPS5999732A JP S5999732 A JPS5999732 A JP S5999732A JP 57209673 A JP57209673 A JP 57209673A JP 20967382 A JP20967382 A JP 20967382A JP S5999732 A JPS5999732 A JP S5999732A
Authority
JP
Japan
Prior art keywords
data
sample
electronic device
background data
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57209673A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0363213B2 (enrdf_load_stackoverflow
Inventor
Kiyomi Koyama
清美 小山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57209673A priority Critical patent/JPS5999732A/ja
Publication of JPS5999732A publication Critical patent/JPS5999732A/ja
Publication of JPH0363213B2 publication Critical patent/JPH0363213B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
JP57209673A 1982-11-30 1982-11-30 電子装置の電位分布測定装置 Granted JPS5999732A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57209673A JPS5999732A (ja) 1982-11-30 1982-11-30 電子装置の電位分布測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57209673A JPS5999732A (ja) 1982-11-30 1982-11-30 電子装置の電位分布測定装置

Publications (2)

Publication Number Publication Date
JPS5999732A true JPS5999732A (ja) 1984-06-08
JPH0363213B2 JPH0363213B2 (enrdf_load_stackoverflow) 1991-09-30

Family

ID=16576708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57209673A Granted JPS5999732A (ja) 1982-11-30 1982-11-30 電子装置の電位分布測定装置

Country Status (1)

Country Link
JP (1) JPS5999732A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011001635A1 (ja) * 2009-06-30 2011-01-06 株式会社日立ハイテクノロジーズ 半導体検査装置及びそれを用いた半導体検査方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011001635A1 (ja) * 2009-06-30 2011-01-06 株式会社日立ハイテクノロジーズ 半導体検査装置及びそれを用いた半導体検査方法
JP5400882B2 (ja) * 2009-06-30 2014-01-29 株式会社日立ハイテクノロジーズ 半導体検査装置及びそれを用いた半導体検査方法
US9123504B2 (en) 2009-06-30 2015-09-01 Hitachi High-Technologies Corporation Semiconductor inspection device and semiconductor inspection method using the same

Also Published As

Publication number Publication date
JPH0363213B2 (enrdf_load_stackoverflow) 1991-09-30

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