JPS5980463U - 蒸着装置 - Google Patents

蒸着装置

Info

Publication number
JPS5980463U
JPS5980463U JP17655282U JP17655282U JPS5980463U JP S5980463 U JPS5980463 U JP S5980463U JP 17655282 U JP17655282 U JP 17655282U JP 17655282 U JP17655282 U JP 17655282U JP S5980463 U JPS5980463 U JP S5980463U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition equipment
vacuum chamber
filter
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17655282U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139712Y2 (OSRAM
Inventor
亀谷　実
渡辺　源一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP17655282U priority Critical patent/JPS5980463U/ja
Publication of JPS5980463U publication Critical patent/JPS5980463U/ja
Application granted granted Critical
Publication of JPH0139712Y2 publication Critical patent/JPH0139712Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP17655282U 1982-11-24 1982-11-24 蒸着装置 Granted JPS5980463U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17655282U JPS5980463U (ja) 1982-11-24 1982-11-24 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17655282U JPS5980463U (ja) 1982-11-24 1982-11-24 蒸着装置

Publications (2)

Publication Number Publication Date
JPS5980463U true JPS5980463U (ja) 1984-05-31
JPH0139712Y2 JPH0139712Y2 (OSRAM) 1989-11-29

Family

ID=30383819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17655282U Granted JPS5980463U (ja) 1982-11-24 1982-11-24 蒸着装置

Country Status (1)

Country Link
JP (1) JPS5980463U (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742866A (en) * 1980-08-28 1982-03-10 Diesel Kiki Co Ltd Obstacle detector
JPS57176554A (en) * 1981-04-07 1982-10-29 Philips Nv Magnetic tape cassette device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742866A (en) * 1980-08-28 1982-03-10 Diesel Kiki Co Ltd Obstacle detector
JPS57176554A (en) * 1981-04-07 1982-10-29 Philips Nv Magnetic tape cassette device

Also Published As

Publication number Publication date
JPH0139712Y2 (OSRAM) 1989-11-29

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