JPS5978533A - 露光装置 - Google Patents

露光装置

Info

Publication number
JPS5978533A
JPS5978533A JP57189684A JP18968482A JPS5978533A JP S5978533 A JPS5978533 A JP S5978533A JP 57189684 A JP57189684 A JP 57189684A JP 18968482 A JP18968482 A JP 18968482A JP S5978533 A JPS5978533 A JP S5978533A
Authority
JP
Japan
Prior art keywords
photomask
wafer
alignment
moving
fluid bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57189684A
Other languages
English (en)
Japanese (ja)
Inventor
「いそ」端　純二
Jiyunji Isohata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP57189684A priority Critical patent/JPS5978533A/ja
Priority to US06/542,978 priority patent/US4563820A/en
Priority to GB08327928A priority patent/GB2131186B/en
Priority to DE19833338727 priority patent/DE3338727A1/de
Publication of JPS5978533A publication Critical patent/JPS5978533A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/02—Air

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Projection-Type Copiers In General (AREA)
JP57189684A 1982-10-27 1982-10-27 露光装置 Pending JPS5978533A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP57189684A JPS5978533A (ja) 1982-10-27 1982-10-27 露光装置
US06/542,978 US4563820A (en) 1982-10-27 1983-10-18 Aligning system
GB08327928A GB2131186B (en) 1982-10-27 1983-10-19 Aligning system
DE19833338727 DE3338727A1 (de) 1982-10-27 1983-10-25 Ausrichtsystem

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57189684A JPS5978533A (ja) 1982-10-27 1982-10-27 露光装置

Publications (1)

Publication Number Publication Date
JPS5978533A true JPS5978533A (ja) 1984-05-07

Family

ID=16245444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57189684A Pending JPS5978533A (ja) 1982-10-27 1982-10-27 露光装置

Country Status (4)

Country Link
US (1) US4563820A (enExample)
JP (1) JPS5978533A (enExample)
DE (1) DE3338727A1 (enExample)
GB (1) GB2131186B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4734988A (en) * 1986-02-25 1988-04-05 General Electric Company Method of aligning a collimator to a linear array X-ray detector
US4906878A (en) * 1986-10-08 1990-03-06 Fanamation, Inc. Fluid circulated linear motor for robotic systems
DE69007833T2 (de) * 1989-03-07 1994-08-18 Toshiba Kawasaki Kk Grob-/Feinausrichtvorrichtung.
JP3197010B2 (ja) * 1990-03-05 2001-08-13 株式会社東芝 間隔設定方法及び間隔設定装置
JPH06183561A (ja) * 1992-12-18 1994-07-05 Canon Inc 移動ステージ装置
JPH08293459A (ja) * 1995-04-21 1996-11-05 Nikon Corp ステージ駆動制御方法及びその装置
US5821981A (en) * 1996-07-02 1998-10-13 Gerber Systems Corporation Magnetically preloaded air bearing motion system for an imaging device
JP2004142035A (ja) * 2002-10-25 2004-05-20 Mori Seiki Co Ltd 工作機械
EP1500987A1 (en) * 2003-07-21 2005-01-26 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS5712743B2 (enExample) * 1976-01-09 1982-03-12
JPS57165831A (en) * 1981-04-07 1982-10-13 Canon Inc Projection printing device

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3231319A (en) * 1962-12-13 1966-01-25 Gordon H Porath Precision slide
US3813789A (en) * 1967-06-26 1974-06-04 Shelton Metrology Labor Inc Measuring apparatus
US3744902A (en) * 1968-10-23 1973-07-10 Siemens Ag Device for producing a photo-varnish mask
US3736818A (en) * 1970-07-10 1973-06-05 Asquith Ltd William Hydrostatic bearings
FR2098524A5 (enExample) * 1970-07-17 1972-03-10 Thomson Csf
GB1393035A (en) * 1971-07-09 1975-05-07 Olivetti & Co Spa Precision measuring apparatus with aerostatic bearings
US3844655A (en) * 1973-07-27 1974-10-29 Kasper Instruments Method and means for forming an aligned mask that does not include alignment marks employed in aligning the mask
SU658406A1 (ru) * 1977-02-14 1979-04-25 Вильнюсский Филиал Экспериментального Научно-Исследовательского Института Металлорежущих Станков Устройство дл измерени линейных размеров
US4202623A (en) * 1979-01-08 1980-05-13 The Perkin-Elmer Corporation Temperature compensated alignment system
JPS55121640A (en) * 1979-03-13 1980-09-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask alignment method
US4414749A (en) * 1979-07-02 1983-11-15 Optimetrix Corporation Alignment and exposure system with an indicium of an axis of motion of the system
US4370054A (en) * 1981-04-02 1983-01-25 Canon Kabushiki Kaisha Projection exposure apparatus
JPS5825637A (ja) * 1981-08-08 1983-02-15 Canon Inc 投影焼付装置
JPS58116735A (ja) * 1981-12-29 1983-07-12 Canon Inc 投影焼付方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5712743B2 (enExample) * 1976-01-09 1982-03-12
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS57165831A (en) * 1981-04-07 1982-10-13 Canon Inc Projection printing device

Also Published As

Publication number Publication date
GB2131186B (en) 1986-09-10
DE3338727A1 (de) 1984-05-03
GB8327928D0 (en) 1983-11-23
US4563820A (en) 1986-01-14
GB2131186A (en) 1984-06-13
DE3338727C2 (enExample) 1993-04-01

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