JPH10321498A5 - - Google Patents

Info

Publication number
JPH10321498A5
JPH10321498A5 JP1997125204A JP12520497A JPH10321498A5 JP H10321498 A5 JPH10321498 A5 JP H10321498A5 JP 1997125204 A JP1997125204 A JP 1997125204A JP 12520497 A JP12520497 A JP 12520497A JP H10321498 A5 JPH10321498 A5 JP H10321498A5
Authority
JP
Japan
Prior art keywords
projection
optical system
exposure apparatus
magnification
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP1997125204A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10321498A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9125204A priority Critical patent/JPH10321498A/ja
Priority claimed from JP9125204A external-priority patent/JPH10321498A/ja
Publication of JPH10321498A publication Critical patent/JPH10321498A/ja
Publication of JPH10321498A5 publication Critical patent/JPH10321498A5/ja
Abandoned legal-status Critical Current

Links

JP9125204A 1997-05-15 1997-05-15 投影露光装置及び該装置を使用した露光方法 Abandoned JPH10321498A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9125204A JPH10321498A (ja) 1997-05-15 1997-05-15 投影露光装置及び該装置を使用した露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9125204A JPH10321498A (ja) 1997-05-15 1997-05-15 投影露光装置及び該装置を使用した露光方法

Publications (2)

Publication Number Publication Date
JPH10321498A JPH10321498A (ja) 1998-12-04
JPH10321498A5 true JPH10321498A5 (enExample) 2005-08-04

Family

ID=14904487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9125204A Abandoned JPH10321498A (ja) 1997-05-15 1997-05-15 投影露光装置及び該装置を使用した露光方法

Country Status (1)

Country Link
JP (1) JPH10321498A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005243725A (ja) * 2004-02-24 2005-09-08 Tadahiro Omi スキャン型露光装置
WO2007026390A1 (ja) * 2005-08-30 2007-03-08 Tadahiro Ohmi スキャン型露光装置
JP2010109220A (ja) * 2008-10-31 2010-05-13 Nikon Corp マスクレス露光装置およびマスクレス露光方法
CN106462085B (zh) * 2014-06-23 2019-05-17 Asml荷兰有限公司 光刻设备和方法

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