JPS5973826A - 薄膜電熱可動装置 - Google Patents

薄膜電熱可動装置

Info

Publication number
JPS5973826A
JPS5973826A JP58133567A JP13356783A JPS5973826A JP S5973826 A JPS5973826 A JP S5973826A JP 58133567 A JP58133567 A JP 58133567A JP 13356783 A JP13356783 A JP 13356783A JP S5973826 A JPS5973826 A JP S5973826A
Authority
JP
Japan
Prior art keywords
thin film
switch
substrate
heating element
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58133567A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213411B2 (enExample
Inventor
ロバ−ト・アレン・ミユ−ラ−
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Publication of JPS5973826A publication Critical patent/JPS5973826A/ja
Publication of JPH0213411B2 publication Critical patent/JPH0213411B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/014—Switches characterised by the shape having a cantilever fixed on one side connected to one or more dimples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thermally Actuated Switches (AREA)
  • Manufacture Of Switches (AREA)
  • Micromachines (AREA)
JP58133567A 1982-07-21 1983-07-21 薄膜電熱可動装置 Granted JPS5973826A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/400,331 US4423401A (en) 1982-07-21 1982-07-21 Thin-film electrothermal device
US400331 1982-07-21

Publications (2)

Publication Number Publication Date
JPS5973826A true JPS5973826A (ja) 1984-04-26
JPH0213411B2 JPH0213411B2 (enExample) 1990-04-04

Family

ID=23583171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58133567A Granted JPS5973826A (ja) 1982-07-21 1983-07-21 薄膜電熱可動装置

Country Status (2)

Country Link
US (1) US4423401A (enExample)
JP (1) JPS5973826A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008149444A1 (ja) * 2007-06-07 2008-12-11 Fujitsu Limited ヘッドスライダおよび記憶媒体駆動装置
JP2011003268A (ja) * 2010-08-31 2011-01-06 Toshiba Storage Device Corp ヘッドスライダおよび記憶媒体駆動装置

Families Citing this family (139)

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FR2559946B1 (fr) * 1984-02-20 1988-03-11 Merlin Gerin Declencheur thermique a bilame chauffee indirectement
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US4727633A (en) * 1985-08-08 1988-03-01 Tektronix, Inc. Method of securing metallic members together
DE3539425A1 (de) * 1985-11-07 1987-05-14 Limitor Ag Thermobimetallschalter
US4740774A (en) * 1986-08-04 1988-04-26 Honeywell Inc. Thermostat having heat anticipation
DE3809597A1 (de) * 1988-03-22 1989-10-05 Fraunhofer Ges Forschung Mikromechanisches stellelement
DE3841557A1 (de) * 1988-12-09 1990-06-13 Fraunhofer Ges Forschung Mikromechanischer manipulator
DE3844669A1 (de) * 1988-12-09 1990-06-13 Fraunhofer Ges Forschung Mikromechanische einrichtung
US5652671A (en) * 1994-06-30 1997-07-29 Texas Instruments Incorporated Hinge for micro-mechanical device
SE9501547D0 (sv) * 1995-04-27 1995-04-27 Pharmacia Ab Micromachined structures actuated by hinges and use thereof
US5613861A (en) 1995-06-07 1997-03-25 Xerox Corporation Photolithographically patterned spring contact
JP3215629B2 (ja) * 1996-07-12 2001-10-09 シャープ株式会社 記録ヘッド
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US7381340B2 (en) * 1997-07-15 2008-06-03 Silverbrook Research Pty Ltd Ink jet printhead that incorporates an etch stop layer
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Citations (2)

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US3763454A (en) * 1972-02-22 1973-10-02 Tektronix Inc Thermal switch
JPS4971763U (enExample) * 1972-10-04 1974-06-21

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US3763454A (en) * 1972-02-22 1973-10-02 Tektronix Inc Thermal switch
JPS4971763U (enExample) * 1972-10-04 1974-06-21

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008149444A1 (ja) * 2007-06-07 2008-12-11 Fujitsu Limited ヘッドスライダおよび記憶媒体駆動装置
JPWO2008149444A1 (ja) * 2007-06-07 2010-08-19 東芝ストレージデバイス株式会社 ヘッドスライダおよび記憶媒体駆動装置
US7944648B2 (en) 2007-06-07 2011-05-17 Toshiba Storage Device Corporation Head slider and storage medium driving device
JP4697714B2 (ja) * 2007-06-07 2011-06-08 東芝ストレージデバイス株式会社 ヘッドスライダ、記憶媒体駆動装置およびヘッドスライダの製造方法
JP2011003268A (ja) * 2010-08-31 2011-01-06 Toshiba Storage Device Corp ヘッドスライダおよび記憶媒体駆動装置

Also Published As

Publication number Publication date
JPH0213411B2 (enExample) 1990-04-04
US4423401A (en) 1983-12-27

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