SE9501547D0 - Micromachined structures actuated by hinges and use thereof - Google Patents

Micromachined structures actuated by hinges and use thereof

Info

Publication number
SE9501547D0
SE9501547D0 SE9501547A SE9501547A SE9501547D0 SE 9501547 D0 SE9501547 D0 SE 9501547D0 SE 9501547 A SE9501547 A SE 9501547A SE 9501547 A SE9501547 A SE 9501547A SE 9501547 D0 SE9501547 D0 SE 9501547D0
Authority
SE
Sweden
Prior art keywords
hinges
bending
rigid components
further preferred
rigid
Prior art date
Application number
SE9501547A
Other languages
English (en)
Inventor
Elisabeth Smela
Olle Inganaes
Ingemar Lundstroem
Original Assignee
Pharmacia Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pharmacia Ab filed Critical Pharmacia Ab
Priority to SE9501547A priority Critical patent/SE9501547D0/sv
Publication of SE9501547D0 publication Critical patent/SE9501547D0/sv
Priority to AU55209/96A priority patent/AU5520996A/en
Priority to PCT/SE1996/000539 priority patent/WO1996034417A1/en

Links

SE9501547A 1995-04-27 1995-04-27 Micromachined structures actuated by hinges and use thereof SE9501547D0 (sv)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SE9501547A SE9501547D0 (sv) 1995-04-27 1995-04-27 Micromachined structures actuated by hinges and use thereof
AU55209/96A AU5520996A (en) 1995-04-27 1996-04-24 A micromachined structure and use thereof, and a micromachin ed device and a method for the manufacture thereof
PCT/SE1996/000539 WO1996034417A1 (en) 1995-04-27 1996-04-24 A micromachined structure and use thereof, and a micromachined device and a method for the manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9501547A SE9501547D0 (sv) 1995-04-27 1995-04-27 Micromachined structures actuated by hinges and use thereof

Publications (1)

Publication Number Publication Date
SE9501547D0 true SE9501547D0 (sv) 1995-04-27

Family

ID=20398099

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9501547A SE9501547D0 (sv) 1995-04-27 1995-04-27 Micromachined structures actuated by hinges and use thereof

Country Status (3)

Country Link
AU (1) AU5520996A (sv)
SE (1) SE9501547D0 (sv)
WO (1) WO1996034417A1 (sv)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5796152A (en) * 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure
US6206914B1 (en) 1998-04-30 2001-03-27 Medtronic, Inc. Implantable system with drug-eluting cells for on-demand local drug delivery
EP1026192A1 (en) * 1999-02-01 2000-08-09 Forskningscenter Riso Novel composite capable of rapid volume change
US6677709B1 (en) 2000-07-18 2004-01-13 General Electric Company Micro electromechanical system controlled organic led and pixel arrays and method of using and of manufacturing same
US6483419B1 (en) 2000-09-12 2002-11-19 3M Innovative Properties Company Combination horizontal and vertical thermal actuator
US6531947B1 (en) 2000-09-12 2003-03-11 3M Innovative Properties Company Direct acting vertical thermal actuator with controlled bending
US6708491B1 (en) 2000-09-12 2004-03-23 3M Innovative Properties Company Direct acting vertical thermal actuator
US6888979B2 (en) 2000-11-29 2005-05-03 Analog Devices, Inc. MEMS mirrors with precision clamping mechanism
US6812217B2 (en) 2000-12-04 2004-11-02 Medtronic, Inc. Medical device and methods of use
WO2002084374A1 (en) * 2001-04-12 2002-10-24 Onix Microsystems Mems mirrors with precision clamping mechanism
US6438954B1 (en) 2001-04-27 2002-08-27 3M Innovative Properties Company Multi-directional thermal actuator
DE10333196A1 (de) * 2003-07-22 2005-03-03 Monty Knopp Verfahren zur Datenspeicher mit MEMS-Schaltfilter
EP1784890A4 (en) 2004-06-14 2010-04-07 Massachusetts Inst Technology ELECTROCHEMICAL METHODS, DEVICES AND STRUCTURES
DE102005001116A1 (de) * 2005-01-05 2006-07-20 Universität Kassel Mikrosystemtechnisches Bauelement

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3896309A (en) * 1973-05-21 1975-07-22 Westinghouse Electric Corp Radiation detecting device
US4056816A (en) * 1976-10-05 1977-11-01 Guim R Light emitting diode blown circuit breaker indicator
US4423401A (en) * 1982-07-21 1983-12-27 Tektronix, Inc. Thin-film electrothermal device
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
DE3844669A1 (de) * 1988-12-09 1990-06-13 Fraunhofer Ges Forschung Mikromechanische einrichtung
NZ241766A (en) * 1991-03-01 1994-12-22 Commw Scient Ind Res Org Temperature sensitive valve attached to a package
US5250167A (en) * 1992-06-22 1993-10-05 The United States Of America As Represented By The United States Department Of Energy Electrically controlled polymeric gel actuators
JPH0674213A (ja) * 1992-08-26 1994-03-15 Mitsubishi Cable Ind Ltd マイクログリッパ機構
US5389222A (en) * 1993-09-21 1995-02-14 The United States Of America As Represented By The United States Department Of Energy Spring-loaded polymeric gel actuators
JPH07281614A (ja) * 1994-04-06 1995-10-27 Olympus Optical Co Ltd マイクロマシンを利用した表示装置

Also Published As

Publication number Publication date
WO1996034417A1 (en) 1996-10-31
AU5520996A (en) 1996-11-18

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