AU5520996A - A micromachined structure and use thereof, and a micromachin ed device and a method for the manufacture thereof - Google Patents

A micromachined structure and use thereof, and a micromachin ed device and a method for the manufacture thereof

Info

Publication number
AU5520996A
AU5520996A AU55209/96A AU5520996A AU5520996A AU 5520996 A AU5520996 A AU 5520996A AU 55209/96 A AU55209/96 A AU 55209/96A AU 5520996 A AU5520996 A AU 5520996A AU 5520996 A AU5520996 A AU 5520996A
Authority
AU
Australia
Prior art keywords
micromachin
manufacture
micromachined structure
micromachined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU55209/96A
Inventor
Olle Iganas
Ingemar Lundstrom
Elisabeth Smela
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU5520996A publication Critical patent/AU5520996A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
AU55209/96A 1995-04-27 1996-04-24 A micromachined structure and use thereof, and a micromachin ed device and a method for the manufacture thereof Abandoned AU5520996A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9501547 1995-04-27
SE9501547A SE9501547D0 (en) 1995-04-27 1995-04-27 Micromachined structures actuated by hinges and use thereof
PCT/SE1996/000539 WO1996034417A1 (en) 1995-04-27 1996-04-24 A micromachined structure and use thereof, and a micromachined device and a method for the manufacture thereof

Publications (1)

Publication Number Publication Date
AU5520996A true AU5520996A (en) 1996-11-18

Family

ID=20398099

Family Applications (1)

Application Number Title Priority Date Filing Date
AU55209/96A Abandoned AU5520996A (en) 1995-04-27 1996-04-24 A micromachined structure and use thereof, and a micromachin ed device and a method for the manufacture thereof

Country Status (3)

Country Link
AU (1) AU5520996A (en)
SE (1) SE9501547D0 (en)
WO (1) WO1996034417A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5796152A (en) * 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure
US6206914B1 (en) 1998-04-30 2001-03-27 Medtronic, Inc. Implantable system with drug-eluting cells for on-demand local drug delivery
EP1026192A1 (en) * 1999-02-01 2000-08-09 Forskningscenter Riso Novel composite capable of rapid volume change
US6677709B1 (en) * 2000-07-18 2004-01-13 General Electric Company Micro electromechanical system controlled organic led and pixel arrays and method of using and of manufacturing same
US6483419B1 (en) 2000-09-12 2002-11-19 3M Innovative Properties Company Combination horizontal and vertical thermal actuator
US6531947B1 (en) 2000-09-12 2003-03-11 3M Innovative Properties Company Direct acting vertical thermal actuator with controlled bending
US6708491B1 (en) 2000-09-12 2004-03-23 3M Innovative Properties Company Direct acting vertical thermal actuator
US6888979B2 (en) 2000-11-29 2005-05-03 Analog Devices, Inc. MEMS mirrors with precision clamping mechanism
US6812217B2 (en) 2000-12-04 2004-11-02 Medtronic, Inc. Medical device and methods of use
WO2002084374A1 (en) * 2001-04-12 2002-10-24 Onix Microsystems Mems mirrors with precision clamping mechanism
US6438954B1 (en) 2001-04-27 2002-08-27 3M Innovative Properties Company Multi-directional thermal actuator
DE10333196A1 (en) * 2003-07-22 2005-03-03 Monty Knopp Data storage method with MEMS-switch filters, involves storing and compressing binary discrete information items into common wavelength of electromagnetic spectrum
US7541715B2 (en) 2004-06-14 2009-06-02 Massachusetts Institute Of Technology Electrochemical methods, devices, and structures
DE102005001116A1 (en) * 2005-01-05 2006-07-20 Universität Kassel Microsystem technical component

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3896309A (en) * 1973-05-21 1975-07-22 Westinghouse Electric Corp Radiation detecting device
US4056816A (en) * 1976-10-05 1977-11-01 Guim R Light emitting diode blown circuit breaker indicator
US4423401A (en) * 1982-07-21 1983-12-27 Tektronix, Inc. Thin-film electrothermal device
DE3814150A1 (en) * 1988-04-27 1989-11-09 Draegerwerk Ag VALVE ARRANGEMENT MADE FROM MICROSTRUCTURED COMPONENTS
DE3844669A1 (en) * 1988-12-09 1990-06-13 Fraunhofer Ges Forschung Micromechanical device
US5443851A (en) * 1991-03-01 1995-08-22 Commonwealth Scientific And Industrial Research Org. Temperature sensitive valve for atmosphere control for film packaged products
US5250167A (en) * 1992-06-22 1993-10-05 The United States Of America As Represented By The United States Department Of Energy Electrically controlled polymeric gel actuators
JPH0674213A (en) * 1992-08-26 1994-03-15 Mitsubishi Cable Ind Ltd Micro-gripper mechanism
US5389222A (en) * 1993-09-21 1995-02-14 The United States Of America As Represented By The United States Department Of Energy Spring-loaded polymeric gel actuators
JPH07281614A (en) * 1994-04-06 1995-10-27 Olympus Optical Co Ltd Display device utilizing micromachine

Also Published As

Publication number Publication date
SE9501547D0 (en) 1995-04-27
WO1996034417A1 (en) 1996-10-31

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