JPS5966149A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5966149A
JPS5966149A JP17642482A JP17642482A JPS5966149A JP S5966149 A JPS5966149 A JP S5966149A JP 17642482 A JP17642482 A JP 17642482A JP 17642482 A JP17642482 A JP 17642482A JP S5966149 A JPS5966149 A JP S5966149A
Authority
JP
Japan
Prior art keywords
film
hole
wiring
insulating film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17642482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6366425B2 (enExample
Inventor
Mitsunao Chiba
千葉　光直
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17642482A priority Critical patent/JPS5966149A/ja
Publication of JPS5966149A publication Critical patent/JPS5966149A/ja
Publication of JPS6366425B2 publication Critical patent/JPS6366425B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP17642482A 1982-10-08 1982-10-08 半導体装置の製造方法 Granted JPS5966149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17642482A JPS5966149A (ja) 1982-10-08 1982-10-08 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17642482A JPS5966149A (ja) 1982-10-08 1982-10-08 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5966149A true JPS5966149A (ja) 1984-04-14
JPS6366425B2 JPS6366425B2 (enExample) 1988-12-20

Family

ID=16013451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17642482A Granted JPS5966149A (ja) 1982-10-08 1982-10-08 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5966149A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61112356A (ja) * 1984-08-23 1986-05-30 フエアチアイルド　カメラ　アンド　インストルメント　コ−ポレ−シヨン 集積回路に貫通導体を形成する方法
US4974052A (en) * 1988-10-14 1990-11-27 Mitsubishi Denki Kabushiki Kaisha Plastic packaged semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54142981A (en) * 1978-04-27 1979-11-07 Matsushita Electric Ind Co Ltd Manufacture of insulation gate type semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54142981A (en) * 1978-04-27 1979-11-07 Matsushita Electric Ind Co Ltd Manufacture of insulation gate type semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61112356A (ja) * 1984-08-23 1986-05-30 フエアチアイルド　カメラ　アンド　インストルメント　コ−ポレ−シヨン 集積回路に貫通導体を形成する方法
US4974052A (en) * 1988-10-14 1990-11-27 Mitsubishi Denki Kabushiki Kaisha Plastic packaged semiconductor device

Also Published As

Publication number Publication date
JPS6366425B2 (enExample) 1988-12-20

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