JPS5954628A - 酸化鉄薄膜の製造方法 - Google Patents
酸化鉄薄膜の製造方法Info
- Publication number
- JPS5954628A JPS5954628A JP16581682A JP16581682A JPS5954628A JP S5954628 A JPS5954628 A JP S5954628A JP 16581682 A JP16581682 A JP 16581682A JP 16581682 A JP16581682 A JP 16581682A JP S5954628 A JPS5954628 A JP S5954628A
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- substrate
- iron oxide
- film
- iron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 239000010409 thin film Substances 0.000 title claims abstract description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 229910052742 iron Inorganic materials 0.000 claims abstract description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000010408 film Substances 0.000 claims description 40
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 32
- 238000007254 oxidation reaction Methods 0.000 abstract description 10
- 230000015572 biosynthetic process Effects 0.000 abstract description 9
- 239000011521 glass Substances 0.000 abstract description 2
- 235000019441 ethanol Nutrition 0.000 abstract 2
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 abstract 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 abstract 1
- 235000013980 iron oxide Nutrition 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 9
- SZVJSHCCFOBDDC-UHFFFAOYSA-N ferrosoferric oxide Chemical compound O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 239000013078 crystal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- -1 F e 304 Chemical class 0.000 description 1
- 241000287127 Passeridae Species 0.000 description 1
- 241000270708 Testudinidae Species 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- VBMVTYDPPZVILR-UHFFFAOYSA-N iron(2+);oxygen(2-) Chemical class [O-2].[Fe+2] VBMVTYDPPZVILR-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Compounds Of Iron (AREA)
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16581682A JPS5954628A (ja) | 1982-09-22 | 1982-09-22 | 酸化鉄薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16581682A JPS5954628A (ja) | 1982-09-22 | 1982-09-22 | 酸化鉄薄膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5954628A true JPS5954628A (ja) | 1984-03-29 |
| JPH033613B2 JPH033613B2 (enrdf_load_stackoverflow) | 1991-01-21 |
Family
ID=15819535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16581682A Granted JPS5954628A (ja) | 1982-09-22 | 1982-09-22 | 酸化鉄薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5954628A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012144785A (ja) * | 2011-01-13 | 2012-08-02 | Central Research Institute Of Electric Power Industry | 多機能材及び多機能層を有する基体の製造方法 |
-
1982
- 1982-09-22 JP JP16581682A patent/JPS5954628A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012144785A (ja) * | 2011-01-13 | 2012-08-02 | Central Research Institute Of Electric Power Industry | 多機能材及び多機能層を有する基体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH033613B2 (enrdf_load_stackoverflow) | 1991-01-21 |