JPS5954628A - 酸化鉄薄膜の製造方法 - Google Patents

酸化鉄薄膜の製造方法

Info

Publication number
JPS5954628A
JPS5954628A JP57165816A JP16581682A JPS5954628A JP S5954628 A JPS5954628 A JP S5954628A JP 57165816 A JP57165816 A JP 57165816A JP 16581682 A JP16581682 A JP 16581682A JP S5954628 A JPS5954628 A JP S5954628A
Authority
JP
Japan
Prior art keywords
sputtering
substrate
iron oxide
film
iron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57165816A
Other languages
English (en)
Japanese (ja)
Other versions
JPH033613B2 (OSRAM
Inventor
Masuzo Hattori
服部　益三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57165816A priority Critical patent/JPS5954628A/ja
Publication of JPS5954628A publication Critical patent/JPS5954628A/ja
Publication of JPH033613B2 publication Critical patent/JPH033613B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compounds Of Iron (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP57165816A 1982-09-22 1982-09-22 酸化鉄薄膜の製造方法 Granted JPS5954628A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57165816A JPS5954628A (ja) 1982-09-22 1982-09-22 酸化鉄薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57165816A JPS5954628A (ja) 1982-09-22 1982-09-22 酸化鉄薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS5954628A true JPS5954628A (ja) 1984-03-29
JPH033613B2 JPH033613B2 (OSRAM) 1991-01-21

Family

ID=15819535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57165816A Granted JPS5954628A (ja) 1982-09-22 1982-09-22 酸化鉄薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS5954628A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012144785A (ja) * 2011-01-13 2012-08-02 Central Research Institute Of Electric Power Industry 多機能材及び多機能層を有する基体の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012144785A (ja) * 2011-01-13 2012-08-02 Central Research Institute Of Electric Power Industry 多機能材及び多機能層を有する基体の製造方法

Also Published As

Publication number Publication date
JPH033613B2 (OSRAM) 1991-01-21

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