JPS5939798A - ZnSe単結晶薄膜の製造方法 - Google Patents
ZnSe単結晶薄膜の製造方法Info
- Publication number
- JPS5939798A JPS5939798A JP57148660A JP14866082A JPS5939798A JP S5939798 A JPS5939798 A JP S5939798A JP 57148660 A JP57148660 A JP 57148660A JP 14866082 A JP14866082 A JP 14866082A JP S5939798 A JPS5939798 A JP S5939798A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- single crystal
- temperature
- crystal thin
- zn5e
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
- C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57148660A JPS5939798A (ja) | 1982-08-26 | 1982-08-26 | ZnSe単結晶薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57148660A JPS5939798A (ja) | 1982-08-26 | 1982-08-26 | ZnSe単結晶薄膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5939798A true JPS5939798A (ja) | 1984-03-05 |
| JPS6229400B2 JPS6229400B2 (enExample) | 1987-06-25 |
Family
ID=15457769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57148660A Granted JPS5939798A (ja) | 1982-08-26 | 1982-08-26 | ZnSe単結晶薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5939798A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6278199A (ja) * | 1985-09-30 | 1987-04-10 | Toshiba Corp | 化合物半導体結晶の製造方法 |
| JPS62271438A (ja) * | 1986-05-20 | 1987-11-25 | Matsushita Electric Ind Co Ltd | 結晶成長方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62128098U (enExample) * | 1986-02-01 | 1987-08-13 |
-
1982
- 1982-08-26 JP JP57148660A patent/JPS5939798A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6278199A (ja) * | 1985-09-30 | 1987-04-10 | Toshiba Corp | 化合物半導体結晶の製造方法 |
| JPS62271438A (ja) * | 1986-05-20 | 1987-11-25 | Matsushita Electric Ind Co Ltd | 結晶成長方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6229400B2 (enExample) | 1987-06-25 |
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