JPS5939348A - 真空内試料加熱装置 - Google Patents

真空内試料加熱装置

Info

Publication number
JPS5939348A
JPS5939348A JP14877382A JP14877382A JPS5939348A JP S5939348 A JPS5939348 A JP S5939348A JP 14877382 A JP14877382 A JP 14877382A JP 14877382 A JP14877382 A JP 14877382A JP S5939348 A JPS5939348 A JP S5939348A
Authority
JP
Japan
Prior art keywords
thin film
heater
film heater
vacuum
sapphire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14877382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6159180B2 (enExample
Inventor
Yuichi Mikata
見方　裕一
Masaharu Watanabe
正晴 渡辺
Tomoyasu Inoue
井上　知泰
Shoichi Takahashi
高橋　捷一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd, Toshiba Ceramics Co Ltd filed Critical Toshiba Corp
Priority to JP14877382A priority Critical patent/JPS5939348A/ja
Publication of JPS5939348A publication Critical patent/JPS5939348A/ja
Publication of JPS6159180B2 publication Critical patent/JPS6159180B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Surface Heating Bodies (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP14877382A 1982-08-27 1982-08-27 真空内試料加熱装置 Granted JPS5939348A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14877382A JPS5939348A (ja) 1982-08-27 1982-08-27 真空内試料加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14877382A JPS5939348A (ja) 1982-08-27 1982-08-27 真空内試料加熱装置

Publications (2)

Publication Number Publication Date
JPS5939348A true JPS5939348A (ja) 1984-03-03
JPS6159180B2 JPS6159180B2 (enExample) 1986-12-15

Family

ID=15460334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14877382A Granted JPS5939348A (ja) 1982-08-27 1982-08-27 真空内試料加熱装置

Country Status (1)

Country Link
JP (1) JPS5939348A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63200483A (ja) * 1987-01-23 1988-08-18 ペース　インコーポレーテッド 加熱装置および物理的所定値設定回路
JPH01110245A (ja) * 1987-10-23 1989-04-26 Iwatani Internatl Corp 極低温試験装置
CN104233215A (zh) * 2014-09-01 2014-12-24 蓝思科技股份有限公司 一种蓝宝石镜片上热转印膜和pvd膜之间的强化方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63200483A (ja) * 1987-01-23 1988-08-18 ペース　インコーポレーテッド 加熱装置および物理的所定値設定回路
JPH01110245A (ja) * 1987-10-23 1989-04-26 Iwatani Internatl Corp 極低温試験装置
CN104233215A (zh) * 2014-09-01 2014-12-24 蓝思科技股份有限公司 一种蓝宝石镜片上热转印膜和pvd膜之间的强化方法

Also Published As

Publication number Publication date
JPS6159180B2 (enExample) 1986-12-15

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