JPS5937719A - 縦振動型圧電振動子の製造方法 - Google Patents
縦振動型圧電振動子の製造方法Info
- Publication number
- JPS5937719A JPS5937719A JP14838982A JP14838982A JPS5937719A JP S5937719 A JPS5937719 A JP S5937719A JP 14838982 A JP14838982 A JP 14838982A JP 14838982 A JP14838982 A JP 14838982A JP S5937719 A JPS5937719 A JP S5937719A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- type piezoelectric
- main
- vibrating
- conductive thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 230000010355 oscillation Effects 0.000 title abstract 3
- 238000000034 method Methods 0.000 claims abstract description 29
- 238000001259 photo etching Methods 0.000 claims abstract description 11
- 239000010409 thin film Substances 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 7
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 14
- 238000005260 corrosion Methods 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 8
- 230000000873 masking effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14838982A JPS5937719A (ja) | 1982-08-26 | 1982-08-26 | 縦振動型圧電振動子の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14838982A JPS5937719A (ja) | 1982-08-26 | 1982-08-26 | 縦振動型圧電振動子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5937719A true JPS5937719A (ja) | 1984-03-01 |
JPH0241924B2 JPH0241924B2 (enrdf_load_stackoverflow) | 1990-09-20 |
Family
ID=15451675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14838982A Granted JPS5937719A (ja) | 1982-08-26 | 1982-08-26 | 縦振動型圧電振動子の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5937719A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02132910A (ja) * | 1988-11-14 | 1990-05-22 | Seiko Electronic Components Ltd | 縦水晶振動子 |
JPH02132913A (ja) * | 1988-11-14 | 1990-05-22 | Seiko Electronic Components Ltd | 縦水晶振動子 |
JPH02132909A (ja) * | 1988-11-14 | 1990-05-22 | Seiko Electronic Components Ltd | 縦水晶振動子の電極構造 |
US5059853A (en) * | 1987-06-02 | 1991-10-22 | Seiko Electric Components Ltd. | Longitudinal quartz crystal resonator |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51100693A (en) * | 1975-03-04 | 1976-09-06 | Citizen Watch Co Ltd | Atsudenshindoshino denkyokumakukoseiho |
JPS5263093A (en) * | 1975-11-19 | 1977-05-25 | Seiko Instr & Electronics Ltd | Method of manufacturing piezo-electric oscillator |
-
1982
- 1982-08-26 JP JP14838982A patent/JPS5937719A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51100693A (en) * | 1975-03-04 | 1976-09-06 | Citizen Watch Co Ltd | Atsudenshindoshino denkyokumakukoseiho |
JPS5263093A (en) * | 1975-11-19 | 1977-05-25 | Seiko Instr & Electronics Ltd | Method of manufacturing piezo-electric oscillator |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5059853A (en) * | 1987-06-02 | 1991-10-22 | Seiko Electric Components Ltd. | Longitudinal quartz crystal resonator |
JPH02132910A (ja) * | 1988-11-14 | 1990-05-22 | Seiko Electronic Components Ltd | 縦水晶振動子 |
JPH02132913A (ja) * | 1988-11-14 | 1990-05-22 | Seiko Electronic Components Ltd | 縦水晶振動子 |
JPH02132909A (ja) * | 1988-11-14 | 1990-05-22 | Seiko Electronic Components Ltd | 縦水晶振動子の電極構造 |
Also Published As
Publication number | Publication date |
---|---|
JPH0241924B2 (enrdf_load_stackoverflow) | 1990-09-20 |
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