JPH0241924B2 - - Google Patents

Info

Publication number
JPH0241924B2
JPH0241924B2 JP57148389A JP14838982A JPH0241924B2 JP H0241924 B2 JPH0241924 B2 JP H0241924B2 JP 57148389 A JP57148389 A JP 57148389A JP 14838982 A JP14838982 A JP 14838982A JP H0241924 B2 JPH0241924 B2 JP H0241924B2
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
conductive thin
etching
thin film
vibration type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57148389A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5937719A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14838982A priority Critical patent/JPS5937719A/ja
Publication of JPS5937719A publication Critical patent/JPS5937719A/ja
Publication of JPH0241924B2 publication Critical patent/JPH0241924B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP14838982A 1982-08-26 1982-08-26 縦振動型圧電振動子の製造方法 Granted JPS5937719A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14838982A JPS5937719A (ja) 1982-08-26 1982-08-26 縦振動型圧電振動子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14838982A JPS5937719A (ja) 1982-08-26 1982-08-26 縦振動型圧電振動子の製造方法

Publications (2)

Publication Number Publication Date
JPS5937719A JPS5937719A (ja) 1984-03-01
JPH0241924B2 true JPH0241924B2 (enrdf_load_stackoverflow) 1990-09-20

Family

ID=15451675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14838982A Granted JPS5937719A (ja) 1982-08-26 1982-08-26 縦振動型圧電振動子の製造方法

Country Status (1)

Country Link
JP (1) JPS5937719A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754891B2 (ja) * 1987-06-02 1995-06-07 セイコー電子部品株式会社 縦水晶振動子
JPH02132913A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子
JPH0831761B2 (ja) * 1988-11-14 1996-03-27 セイコー電子工業株式会社 縦水晶振動子
JPH0831760B2 (ja) * 1988-11-14 1996-03-27 セイコー電子工業株式会社 縦水晶振動子の電極構造

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51100693A (en) * 1975-03-04 1976-09-06 Citizen Watch Co Ltd Atsudenshindoshino denkyokumakukoseiho
JPS5263093A (en) * 1975-11-19 1977-05-25 Seiko Instr & Electronics Ltd Method of manufacturing piezo-electric oscillator

Also Published As

Publication number Publication date
JPS5937719A (ja) 1984-03-01

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