JPS5934641A - 半導体素子特性測定方法 - Google Patents

半導体素子特性測定方法

Info

Publication number
JPS5934641A
JPS5934641A JP57145335A JP14533582A JPS5934641A JP S5934641 A JPS5934641 A JP S5934641A JP 57145335 A JP57145335 A JP 57145335A JP 14533582 A JP14533582 A JP 14533582A JP S5934641 A JPS5934641 A JP S5934641A
Authority
JP
Japan
Prior art keywords
probe card
probe
wafers
stage
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57145335A
Other languages
English (en)
Japanese (ja)
Other versions
JPH038584B2 (fr
Inventor
Hiroyuki Toyoda
裕之 豊田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP57145335A priority Critical patent/JPS5934641A/ja
Publication of JPS5934641A publication Critical patent/JPS5934641A/ja
Publication of JPH038584B2 publication Critical patent/JPH038584B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP57145335A 1982-08-20 1982-08-20 半導体素子特性測定方法 Granted JPS5934641A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57145335A JPS5934641A (ja) 1982-08-20 1982-08-20 半導体素子特性測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57145335A JPS5934641A (ja) 1982-08-20 1982-08-20 半導体素子特性測定方法

Publications (2)

Publication Number Publication Date
JPS5934641A true JPS5934641A (ja) 1984-02-25
JPH038584B2 JPH038584B2 (fr) 1991-02-06

Family

ID=15382787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57145335A Granted JPS5934641A (ja) 1982-08-20 1982-08-20 半導体素子特性測定方法

Country Status (1)

Country Link
JP (1) JPS5934641A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61234543A (ja) * 1985-04-11 1986-10-18 Nippon Maikuronikusu:Kk 半導体ウエハプロ−バ
JPH01157543A (ja) * 1988-11-17 1989-06-20 Tokyo Electron Ltd ウエハプローバ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61234543A (ja) * 1985-04-11 1986-10-18 Nippon Maikuronikusu:Kk 半導体ウエハプロ−バ
JPH01157543A (ja) * 1988-11-17 1989-06-20 Tokyo Electron Ltd ウエハプローバ

Also Published As

Publication number Publication date
JPH038584B2 (fr) 1991-02-06

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