JPH038584B2 - - Google Patents

Info

Publication number
JPH038584B2
JPH038584B2 JP57145335A JP14533582A JPH038584B2 JP H038584 B2 JPH038584 B2 JP H038584B2 JP 57145335 A JP57145335 A JP 57145335A JP 14533582 A JP14533582 A JP 14533582A JP H038584 B2 JPH038584 B2 JP H038584B2
Authority
JP
Japan
Prior art keywords
probe
probe card
stage
semiconductor
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57145335A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5934641A (ja
Inventor
Hiroyuki Toyoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
Original Assignee
NEC Home Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd filed Critical NEC Home Electronics Ltd
Priority to JP57145335A priority Critical patent/JPS5934641A/ja
Publication of JPS5934641A publication Critical patent/JPS5934641A/ja
Publication of JPH038584B2 publication Critical patent/JPH038584B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57145335A 1982-08-20 1982-08-20 半導体素子特性測定方法 Granted JPS5934641A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57145335A JPS5934641A (ja) 1982-08-20 1982-08-20 半導体素子特性測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57145335A JPS5934641A (ja) 1982-08-20 1982-08-20 半導体素子特性測定方法

Publications (2)

Publication Number Publication Date
JPS5934641A JPS5934641A (ja) 1984-02-25
JPH038584B2 true JPH038584B2 (fr) 1991-02-06

Family

ID=15382787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57145335A Granted JPS5934641A (ja) 1982-08-20 1982-08-20 半導体素子特性測定方法

Country Status (1)

Country Link
JP (1) JPS5934641A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61234543A (ja) * 1985-04-11 1986-10-18 Nippon Maikuronikusu:Kk 半導体ウエハプロ−バ
JP2580288B2 (ja) * 1988-11-17 1997-02-12 東京エレクトロン 株式会社 ウエハプローバ

Also Published As

Publication number Publication date
JPS5934641A (ja) 1984-02-25

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