JPS5927407A - 表示用電極の形成方法 - Google Patents
表示用電極の形成方法Info
- Publication number
- JPS5927407A JPS5927407A JP13824682A JP13824682A JPS5927407A JP S5927407 A JPS5927407 A JP S5927407A JP 13824682 A JP13824682 A JP 13824682A JP 13824682 A JP13824682 A JP 13824682A JP S5927407 A JPS5927407 A JP S5927407A
- Authority
- JP
- Japan
- Prior art keywords
- film
- metal film
- resist film
- forming
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 35
- 239000002184 metal Substances 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 15
- 238000005530 etching Methods 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000005336 cracking Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 28
- 239000011521 glass Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 241000270617 Cheloniidae Species 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13824682A JPS5927407A (ja) | 1982-08-09 | 1982-08-09 | 表示用電極の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13824682A JPS5927407A (ja) | 1982-08-09 | 1982-08-09 | 表示用電極の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5927407A true JPS5927407A (ja) | 1984-02-13 |
| JPH0337248B2 JPH0337248B2 (enrdf_load_stackoverflow) | 1991-06-05 |
Family
ID=15217480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13824682A Granted JPS5927407A (ja) | 1982-08-09 | 1982-08-09 | 表示用電極の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5927407A (enrdf_load_stackoverflow) |
-
1982
- 1982-08-09 JP JP13824682A patent/JPS5927407A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0337248B2 (enrdf_load_stackoverflow) | 1991-06-05 |
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